3/15/2011	9:03:20 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2011	9:03:21 AM	Recipe started at 9:03 AM
3/15/2011	9:03:21 AM	H2 valve closed
3/15/2011	9:03:21 AM	BCl3 valve closed
3/15/2011	9:03:21 AM	PH3 valve closed
3/15/2011	9:03:21 AM	SiCl4 pre valve closed
3/15/2011	9:03:21 AM	SiCl4 post valve closed
3/15/2011	9:03:21 AM	Main Vac valve closed
3/15/2011	9:03:21 AM	Bypass valve closed
3/15/2011	9:03:21 AM	Bubbler valve closed
3/15/2011	9:03:21 AM	Helium valve opened
3/15/2011	9:03:21 AM	Helium MFC set to  500.000000
3/15/2011	9:03:21 AM	H2 MFC set to  0.000000
3/15/2011	9:03:21 AM	BCl3 MFC set to  0.000000
3/15/2011	9:03:21 AM	PHl3 MFC set to  0.000000
3/15/2011	9:03:21 AM	SiCl4 MFC set to  0.000000
3/15/2011	9:03:21 AM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:03:21 AM	Tube furnace set to 0
3/15/2011	9:04:42 AM	Helium valve closed
3/15/2011	9:04:42 AM	H2 valve closed
3/15/2011	9:04:42 AM	BCl3 valve closed
3/15/2011	9:04:42 AM	PH3 valve closed
3/15/2011	9:04:42 AM	SiCl4 pre valve closed
3/15/2011	9:04:42 AM	SiCl4 post valve closed
3/15/2011	9:04:42 AM	Main Vac valve closed
3/15/2011	9:04:42 AM	Bypass valve closed
3/15/2011	9:04:42 AM	Bubbler valve closed
3/15/2011	9:04:42 AM	Helium MFC set to  0.000000
3/15/2011	9:04:42 AM	H2 MFC set to  0.000000
3/15/2011	9:04:42 AM	BCl3 MFC set to  0.000000
3/15/2011	9:04:42 AM	PHl3 MFC set to  0.000000
3/15/2011	9:04:42 AM	SiCl4 MFC set to  0.000000
3/15/2011	9:04:42 AM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:04:42 AM	Tube furnace set to 0
3/15/2011	9:04:42 AM	Run finished at 9:04 AM
3/15/2011	9:04:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2011	9:11:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	9:11:32 AM	Recipe started at 9:11 AM
3/15/2011	9:11:32 AM	Helium valve closed
3/15/2011	9:11:32 AM	H2 valve closed
3/15/2011	9:11:32 AM	BCl3 valve closed
3/15/2011	9:11:32 AM	PH3 valve closed
3/15/2011	9:11:32 AM	SiCl4 pre valve closed
3/15/2011	9:11:32 AM	SiCl4 post valve closed
3/15/2011	9:11:32 AM	Main Vac valve closed
3/15/2011	9:11:32 AM	Bubbler valve closed
3/15/2011	9:11:32 AM	Bypass valve opened
3/15/2011	9:11:32 AM	Helium MFC set to  0.000000
3/15/2011	9:11:32 AM	H2 MFC set to  0.000000
3/15/2011	9:11:32 AM	BCl3 MFC set to  0.000000
3/15/2011	9:11:32 AM	PHl3 MFC set to  0.000000
3/15/2011	9:11:32 AM	SiCl4 MFC set to  0.000000
3/15/2011	9:11:32 AM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:11:32 AM	Tube furnace set to 0
3/15/2011	9:12:04 AM	Helium valve closed
3/15/2011	9:12:04 AM	H2 valve closed
3/15/2011	9:12:04 AM	BCl3 valve closed
3/15/2011	9:12:04 AM	PH3 valve closed
3/15/2011	9:12:04 AM	SiCl4 pre valve closed
3/15/2011	9:12:04 AM	SiCl4 post valve closed
3/15/2011	9:12:04 AM	Bubbler valve closed
3/15/2011	9:12:04 AM	Main Vac valve opened
3/15/2011	9:12:04 AM	Bypass valve opened
3/15/2011	9:12:04 AM	Helium MFC set to  0.000000
3/15/2011	9:12:04 AM	H2 MFC set to  0.000000
3/15/2011	9:12:04 AM	BCl3 MFC set to  0.000000
3/15/2011	9:12:04 AM	PHl3 MFC set to  0.000000
3/15/2011	9:12:04 AM	SiCl4 MFC set to  0.000000
3/15/2011	9:12:04 AM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:12:04 AM	Tube furnace set to 0
3/15/2011	9:12:05 AM	Run finished at 9:12 AM
3/15/2011	9:12:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	9:14:18 AM	Helium MFC set to  50.000000
3/15/2011	9:14:19 AM	Helium valve opened
3/15/2011	9:14:27 AM	Tube furnace set to 120
3/15/2011	9:15:34 AM	Helium MFC set to  10.000000
3/15/2011	9:16:46 AM	Helium MFC set to  0.000000
3/15/2011	9:16:47 AM	Helium valve closed
3/15/2011	9:17:26 AM	Tube furnace set to 0
3/15/2011	9:23:11 AM	Helium MFC set to  10.000000
3/15/2011	9:23:11 AM	Helium valve opened
3/15/2011	9:26:53 AM	Helium MFC set to  0.000000
3/15/2011	9:26:53 AM	Helium valve closed
3/15/2011	9:53:55 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/15/2011	9:54:07 AM	Recipe started at 9:54 AM
3/15/2011	9:54:07 AM	Helium valve closed
3/15/2011	9:54:07 AM	H2 valve closed
3/15/2011	9:54:07 AM	BCl3 valve closed
3/15/2011	9:54:07 AM	PH3 valve closed
3/15/2011	9:54:07 AM	SiCl4 pre valve closed
3/15/2011	9:54:07 AM	SiCl4 post valve closed
3/15/2011	9:54:07 AM	Main Vac valve closed
3/15/2011	9:54:07 AM	Bubbler valve closed
3/15/2011	9:54:07 AM	Bypass valve opened
3/15/2011	9:54:07 AM	Helium MFC set to  0.000000
3/15/2011	9:54:07 AM	H2 MFC set to  0.000000
3/15/2011	9:54:07 AM	BCl3 MFC set to  0.000000
3/15/2011	9:54:07 AM	PHl3 MFC set to  0.000000
3/15/2011	9:54:07 AM	SiCl4 MFC set to  0.000000
3/15/2011	9:54:07 AM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:54:07 AM	Tube furnace set to 0
3/15/2011	9:54:07 AM	Helium valve closed
3/15/2011	9:54:07 AM	H2 valve closed
3/15/2011	9:54:07 AM	BCl3 valve closed
3/15/2011	9:54:07 AM	PH3 valve closed
3/15/2011	9:54:07 AM	SiCl4 pre valve closed
3/15/2011	9:54:07 AM	SiCl4 post valve closed
3/15/2011	9:54:07 AM	Bubbler valve closed
3/15/2011	9:54:07 AM	Main Vac valve opened
3/15/2011	9:54:07 AM	Bypass valve opened
3/15/2011	9:54:07 AM	Helium MFC set to  0.000000
3/15/2011	9:54:07 AM	H2 MFC set to  0.000000
3/15/2011	9:54:07 AM	BCl3 MFC set to  0.000000
3/15/2011	9:54:07 AM	PHl3 MFC set to  0.000000
3/15/2011	9:54:07 AM	SiCl4 MFC set to  0.000000
3/15/2011	9:54:07 AM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:54:07 AM	Tube furnace set to 0
3/15/2011	9:55:07 AM	H2 valve closed
3/15/2011	9:55:07 AM	BCl3 valve closed
3/15/2011	9:55:07 AM	PH3 valve closed
3/15/2011	9:55:07 AM	SiCl4 pre valve closed
3/15/2011	9:55:08 AM	SiCl4 post valve closed
3/15/2011	9:55:08 AM	Bubbler valve closed
3/15/2011	9:55:08 AM	Helium valve opened
3/15/2011	9:55:08 AM	Main Vac valve opened
3/15/2011	9:55:08 AM	Bypass valve opened
3/15/2011	9:55:08 AM	Helium MFC set to  100.000000
3/15/2011	9:55:08 AM	H2 MFC set to  0.000000
3/15/2011	9:55:08 AM	BCl3 MFC set to  0.000000
3/15/2011	9:55:08 AM	PHl3 MFC set to  0.000000
3/15/2011	9:55:08 AM	SiCl4 MFC set to  0.000000
3/15/2011	9:55:08 AM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:55:08 AM	Tube furnace set to 0
3/15/2011	9:56:08 AM	Helium valve closed
3/15/2011	9:56:08 AM	H2 valve closed
3/15/2011	9:56:08 AM	BCl3 valve closed
3/15/2011	9:56:08 AM	PH3 valve closed
3/15/2011	9:56:08 AM	SiCl4 pre valve closed
3/15/2011	9:56:08 AM	SiCl4 post valve closed
3/15/2011	9:56:08 AM	Bubbler valve closed
3/15/2011	9:56:08 AM	Main Vac valve opened
3/15/2011	9:56:08 AM	Bypass valve opened
3/15/2011	9:56:08 AM	Helium MFC set to  0.000000
3/15/2011	9:56:08 AM	H2 MFC set to  0.000000
3/15/2011	9:56:08 AM	BCl3 MFC set to  0.000000
3/15/2011	9:56:08 AM	PHl3 MFC set to  0.000000
3/15/2011	9:56:08 AM	SiCl4 MFC set to  0.000000
3/15/2011	9:56:08 AM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:56:08 AM	Tube furnace set to 0
3/15/2011	9:57:08 AM	H2 valve closed
3/15/2011	9:57:08 AM	BCl3 valve closed
3/15/2011	9:57:08 AM	PH3 valve closed
3/15/2011	9:57:08 AM	SiCl4 pre valve closed
3/15/2011	9:57:08 AM	SiCl4 post valve closed
3/15/2011	9:57:08 AM	Bubbler valve closed
3/15/2011	9:57:08 AM	Helium valve opened
3/15/2011	9:57:08 AM	Main Vac valve opened
3/15/2011	9:57:08 AM	Bypass valve opened
3/15/2011	9:57:08 AM	Helium MFC set to  100.000000
3/15/2011	9:57:08 AM	H2 MFC set to  0.000000
3/15/2011	9:57:08 AM	BCl3 MFC set to  0.000000
3/15/2011	9:57:08 AM	PHl3 MFC set to  0.000000
3/15/2011	9:57:08 AM	SiCl4 MFC set to  0.000000
3/15/2011	9:57:08 AM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:57:08 AM	Tube furnace set to 0
3/15/2011	9:58:08 AM	Helium valve closed
3/15/2011	9:58:08 AM	H2 valve closed
3/15/2011	9:58:08 AM	BCl3 valve closed
3/15/2011	9:58:08 AM	PH3 valve closed
3/15/2011	9:58:08 AM	SiCl4 pre valve closed
3/15/2011	9:58:08 AM	SiCl4 post valve closed
3/15/2011	9:58:08 AM	Bubbler valve closed
3/15/2011	9:58:08 AM	Main Vac valve opened
3/15/2011	9:58:08 AM	Bypass valve opened
3/15/2011	9:58:08 AM	Helium MFC set to  0.000000
3/15/2011	9:58:08 AM	H2 MFC set to  0.000000
3/15/2011	9:58:08 AM	BCl3 MFC set to  0.000000
3/15/2011	9:58:08 AM	PHl3 MFC set to  0.000000
3/15/2011	9:58:08 AM	SiCl4 MFC set to  0.000000
3/15/2011	9:58:08 AM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:58:08 AM	Tube furnace set to 0
3/15/2011	9:59:08 AM	H2 valve closed
3/15/2011	9:59:08 AM	BCl3 valve closed
3/15/2011	9:59:08 AM	PH3 valve closed
3/15/2011	9:59:08 AM	SiCl4 pre valve closed
3/15/2011	9:59:08 AM	SiCl4 post valve closed
3/15/2011	9:59:08 AM	Bubbler valve closed
3/15/2011	9:59:08 AM	Helium valve opened
3/15/2011	9:59:08 AM	Main Vac valve opened
3/15/2011	9:59:08 AM	Bypass valve opened
3/15/2011	9:59:08 AM	Helium MFC set to  100.000000
3/15/2011	9:59:08 AM	H2 MFC set to  0.000000
3/15/2011	9:59:08 AM	BCl3 MFC set to  0.000000
3/15/2011	9:59:08 AM	PHl3 MFC set to  0.000000
3/15/2011	9:59:08 AM	SiCl4 MFC set to  0.000000
3/15/2011	9:59:08 AM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:59:08 AM	Tube furnace set to 0
3/15/2011	10:00:08 AM	Helium valve closed
3/15/2011	10:00:08 AM	H2 valve closed
3/15/2011	10:00:08 AM	BCl3 valve closed
3/15/2011	10:00:08 AM	PH3 valve closed
3/15/2011	10:00:08 AM	SiCl4 pre valve closed
3/15/2011	10:00:08 AM	SiCl4 post valve closed
3/15/2011	10:00:08 AM	Bubbler valve closed
3/15/2011	10:00:08 AM	Main Vac valve opened
3/15/2011	10:00:08 AM	Bypass valve opened
3/15/2011	10:00:08 AM	Helium MFC set to  0.000000
3/15/2011	10:00:08 AM	H2 MFC set to  0.000000
3/15/2011	10:00:08 AM	BCl3 MFC set to  0.000000
3/15/2011	10:00:09 AM	PHl3 MFC set to  0.000000
3/15/2011	10:00:09 AM	SiCl4 MFC set to  0.000000
3/15/2011	10:00:09 AM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:00:09 AM	Tube furnace set to 0
3/15/2011	10:01:09 AM	H2 valve closed
3/15/2011	10:01:09 AM	BCl3 valve closed
3/15/2011	10:01:09 AM	PH3 valve closed
3/15/2011	10:01:09 AM	SiCl4 pre valve closed
3/15/2011	10:01:09 AM	SiCl4 post valve closed
3/15/2011	10:01:09 AM	Bubbler valve closed
3/15/2011	10:01:09 AM	Helium valve opened
3/15/2011	10:01:09 AM	Main Vac valve opened
3/15/2011	10:01:09 AM	Bypass valve opened
3/15/2011	10:01:09 AM	Helium MFC set to  100.000000
3/15/2011	10:01:09 AM	H2 MFC set to  0.000000
3/15/2011	10:01:09 AM	BCl3 MFC set to  0.000000
3/15/2011	10:01:09 AM	PHl3 MFC set to  0.000000
3/15/2011	10:01:09 AM	SiCl4 MFC set to  0.000000
3/15/2011	10:01:09 AM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:01:09 AM	Tube furnace set to 0
3/15/2011	10:01:40 AM	Run aborted at 10:01 AM
3/15/2011	10:01:40 AM	Helium valve closed
3/15/2011	10:01:40 AM	H2 valve closed
3/15/2011	10:01:40 AM	BCl3 valve closed
3/15/2011	10:01:40 AM	PH3 valve closed
3/15/2011	10:01:40 AM	SiCl4 pre valve closed
3/15/2011	10:01:40 AM	SiCl4 post valve closed
3/15/2011	10:01:40 AM	Bypass valve closed
3/15/2011	10:01:40 AM	Main Vac valve closed
3/15/2011	10:01:40 AM	Bubbler valve closed
3/15/2011	10:01:40 AM	Helium MFC set to  0.000000
3/15/2011	10:01:40 AM	H2 MFC set to  0.000000
3/15/2011	10:01:40 AM	BCl3 MFC set to  0.000000
3/15/2011	10:01:40 AM	PHl3 MFC set to  0.000000
3/15/2011	10:01:40 AM	SiCl4 MFC set to  0.000000
3/15/2011	10:01:40 AM	Tube furnace set to 0
3/15/2011	10:01:40 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/15/2011	10:01:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	10:01:42 AM	Recipe started at 10:01 AM
3/15/2011	10:01:42 AM	Helium valve closed
3/15/2011	10:01:42 AM	H2 valve closed
3/15/2011	10:01:42 AM	BCl3 valve closed
3/15/2011	10:01:42 AM	PH3 valve closed
3/15/2011	10:01:42 AM	SiCl4 pre valve closed
3/15/2011	10:01:42 AM	SiCl4 post valve closed
3/15/2011	10:01:42 AM	Main Vac valve closed
3/15/2011	10:01:42 AM	Bubbler valve closed
3/15/2011	10:01:42 AM	Bypass valve opened
3/15/2011	10:01:42 AM	Helium MFC set to  0.000000
3/15/2011	10:01:42 AM	H2 MFC set to  0.000000
3/15/2011	10:01:42 AM	BCl3 MFC set to  0.000000
3/15/2011	10:01:42 AM	PHl3 MFC set to  0.000000
3/15/2011	10:01:42 AM	SiCl4 MFC set to  0.000000
3/15/2011	10:01:42 AM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:01:42 AM	Tube furnace set to 0
3/15/2011	10:01:42 AM	Helium valve closed
3/15/2011	10:01:42 AM	H2 valve closed
3/15/2011	10:01:42 AM	BCl3 valve closed
3/15/2011	10:01:42 AM	PH3 valve closed
3/15/2011	10:01:42 AM	SiCl4 pre valve closed
3/15/2011	10:01:42 AM	SiCl4 post valve closed
3/15/2011	10:01:42 AM	Bubbler valve closed
3/15/2011	10:01:42 AM	Main Vac valve opened
3/15/2011	10:01:42 AM	Bypass valve opened
3/15/2011	10:01:42 AM	Helium MFC set to  0.000000
3/15/2011	10:01:42 AM	H2 MFC set to  0.000000
3/15/2011	10:01:42 AM	BCl3 MFC set to  0.000000
3/15/2011	10:01:42 AM	PHl3 MFC set to  0.000000
3/15/2011	10:01:42 AM	SiCl4 MFC set to  0.000000
3/15/2011	10:01:42 AM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:01:42 AM	Tube furnace set to 0
3/15/2011	10:01:42 AM	Run finished at 10:01 AM
3/15/2011	10:01:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	10:02:52 AM	Helium MFC set to  50.000000
3/15/2011	10:02:53 AM	Helium MFC set to  50.000000
3/15/2011	10:02:54 AM	Helium valve opened
3/15/2011	10:03:56 AM	Helium MFC set to  0.000000
3/15/2011	10:03:56 AM	Helium valve closed
3/15/2011	10:04:45 AM	Recipe started at 10:04 AM
3/15/2011	10:04:45 AM	Helium valve closed
3/15/2011	10:04:45 AM	BCl3 valve closed
3/15/2011	10:04:45 AM	PH3 valve closed
3/15/2011	10:04:45 AM	SiCl4 pre valve closed
3/15/2011	10:04:45 AM	SiCl4 post valve closed
3/15/2011	10:04:45 AM	Main Vac valve closed
3/15/2011	10:04:45 AM	Bypass valve closed
3/15/2011	10:04:45 AM	Bubbler valve closed
3/15/2011	10:04:45 AM	H2 valve opened
3/15/2011	10:04:45 AM	Helium MFC set to  0.000000
3/15/2011	10:04:45 AM	H2 MFC set to  500.000000
3/15/2011	10:04:45 AM	BCl3 MFC set to  0.000000
3/15/2011	10:04:45 AM	PHl3 MFC set to  0.000000
3/15/2011	10:04:45 AM	SiCl4 MFC set to  0.000000
3/15/2011	10:04:45 AM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:04:45 AM	Tube furnace set to 0
3/15/2011	10:06:06 AM	Helium valve closed
3/15/2011	10:06:06 AM	BCl3 valve closed
3/15/2011	10:06:06 AM	PH3 valve closed
3/15/2011	10:06:06 AM	SiCl4 pre valve closed
3/15/2011	10:06:06 AM	SiCl4 post valve closed
3/15/2011	10:06:06 AM	Main Vac valve closed
3/15/2011	10:06:06 AM	Bypass valve closed
3/15/2011	10:06:06 AM	H2 valve opened
3/15/2011	10:06:06 AM	Bubbler valve opened
3/15/2011	10:06:06 AM	Helium MFC set to  0.000000
3/15/2011	10:06:06 AM	H2 MFC set to  500.000000
3/15/2011	10:06:06 AM	BCl3 MFC set to  0.000000
3/15/2011	10:06:06 AM	PHl3 MFC set to  0.000000
3/15/2011	10:06:06 AM	SiCl4 MFC set to  0.000000
3/15/2011	10:06:06 AM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:06:06 AM	Tube furnace set to 1000
3/15/2011	10:26:06 AM	Helium valve closed
3/15/2011	10:26:06 AM	PH3 valve closed
3/15/2011	10:26:06 AM	Main Vac valve closed
3/15/2011	10:26:06 AM	Bypass valve closed
3/15/2011	10:26:06 AM	H2 valve opened
3/15/2011	10:26:06 AM	BCl3 valve opened
3/15/2011	10:26:06 AM	SiCl4 pre valve opened
3/15/2011	10:26:06 AM	SiCl4 post valve opened
3/15/2011	10:26:06 AM	Bubbler valve opened
3/15/2011	10:26:06 AM	Helium MFC set to  0.000000
3/15/2011	10:26:06 AM	H2 MFC set to  500.000000
3/15/2011	10:26:06 AM	BCl3 MFC set to  3.000000
3/15/2011	10:26:06 AM	PHl3 MFC set to  0.000000
3/15/2011	10:26:06 AM	SiCl4 MFC set to  75.000000
3/15/2011	10:26:06 AM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:26:06 AM	Tube furnace set to 1000
3/15/2011	10:46:06 AM	H2 valve closed
3/15/2011	10:46:06 AM	BCl3 valve closed
3/15/2011	10:46:06 AM	PH3 valve closed
3/15/2011	10:46:06 AM	SiCl4 pre valve closed
3/15/2011	10:46:06 AM	SiCl4 post valve closed
3/15/2011	10:46:06 AM	Main Vac valve closed
3/15/2011	10:46:06 AM	Bypass valve closed
3/15/2011	10:46:06 AM	Helium valve opened
3/15/2011	10:46:06 AM	Bubbler valve opened
3/15/2011	10:46:06 AM	Helium MFC set to  500.000000
3/15/2011	10:46:06 AM	H2 MFC set to  0.000000
3/15/2011	10:46:06 AM	BCl3 MFC set to  0.000000
3/15/2011	10:46:06 AM	PHl3 MFC set to  0.000000
3/15/2011	10:46:06 AM	SiCl4 MFC set to  0.000000
3/15/2011	10:46:06 AM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:46:07 AM	Tube furnace set to 0
3/15/2011	11:06:07 AM	Helium valve closed
3/15/2011	11:06:07 AM	H2 valve closed
3/15/2011	11:06:07 AM	BCl3 valve closed
3/15/2011	11:06:07 AM	PH3 valve closed
3/15/2011	11:06:07 AM	SiCl4 pre valve closed
3/15/2011	11:06:07 AM	SiCl4 post valve closed
3/15/2011	11:06:07 AM	Main Vac valve closed
3/15/2011	11:06:07 AM	Bypass valve closed
3/15/2011	11:06:07 AM	Bubbler valve closed
3/15/2011	11:06:07 AM	Helium MFC set to  0.000000
3/15/2011	11:06:07 AM	H2 MFC set to  0.000000
3/15/2011	11:06:07 AM	BCl3 MFC set to  0.000000
3/15/2011	11:06:07 AM	PHl3 MFC set to  0.000000
3/15/2011	11:06:07 AM	SiCl4 MFC set to  0.000000
3/15/2011	11:06:07 AM	Bypass solenoid MFC set to  0.000000
3/15/2011	11:06:07 AM	Tube furnace set to 0
3/15/2011	11:06:07 AM	Run finished at 11:06 AM
3/15/2011	12:21:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2011	12:21:24 PM	Recipe started at 12:21 PM
3/15/2011	12:21:24 PM	H2 valve closed
3/15/2011	12:21:24 PM	BCl3 valve closed
3/15/2011	12:21:25 PM	PH3 valve closed
3/15/2011	12:21:25 PM	SiCl4 pre valve closed
3/15/2011	12:21:25 PM	SiCl4 post valve closed
3/15/2011	12:21:25 PM	Main Vac valve closed
3/15/2011	12:21:25 PM	Bypass valve closed
3/15/2011	12:21:25 PM	Bubbler valve closed
3/15/2011	12:21:25 PM	Helium valve opened
3/15/2011	12:21:25 PM	Helium MFC set to  500.000000
3/15/2011	12:21:25 PM	H2 MFC set to  0.000000
3/15/2011	12:21:25 PM	BCl3 MFC set to  0.000000
3/15/2011	12:21:25 PM	PHl3 MFC set to  0.000000
3/15/2011	12:21:25 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:21:25 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:21:25 PM	Tube furnace set to 0
3/15/2011	12:21:32 PM	Helium valve closed
3/15/2011	12:21:32 PM	H2 valve closed
3/15/2011	12:21:32 PM	BCl3 valve closed
3/15/2011	12:21:32 PM	PH3 valve closed
3/15/2011	12:21:32 PM	SiCl4 pre valve closed
3/15/2011	12:21:32 PM	SiCl4 post valve closed
3/15/2011	12:21:32 PM	Main Vac valve closed
3/15/2011	12:21:32 PM	Bypass valve closed
3/15/2011	12:21:32 PM	Bubbler valve closed
3/15/2011	12:21:32 PM	Helium MFC set to  0.000000
3/15/2011	12:21:32 PM	H2 MFC set to  0.000000
3/15/2011	12:21:32 PM	BCl3 MFC set to  0.000000
3/15/2011	12:21:32 PM	PHl3 MFC set to  0.000000
3/15/2011	12:21:32 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:21:32 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:21:32 PM	Tube furnace set to 0
3/15/2011	12:21:32 PM	Run finished at 12:21 PM
3/15/2011	12:21:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2011	12:30:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	12:30:36 PM	Recipe started at 12:30 PM
3/15/2011	12:30:36 PM	Helium valve closed
3/15/2011	12:30:36 PM	H2 valve closed
3/15/2011	12:30:36 PM	BCl3 valve closed
3/15/2011	12:30:36 PM	PH3 valve closed
3/15/2011	12:30:36 PM	SiCl4 pre valve closed
3/15/2011	12:30:36 PM	SiCl4 post valve closed
3/15/2011	12:30:36 PM	Main Vac valve closed
3/15/2011	12:30:36 PM	Bubbler valve closed
3/15/2011	12:30:36 PM	Bypass valve opened
3/15/2011	12:30:36 PM	Helium MFC set to  0.000000
3/15/2011	12:30:36 PM	H2 MFC set to  0.000000
3/15/2011	12:30:36 PM	BCl3 MFC set to  0.000000
3/15/2011	12:30:36 PM	PHl3 MFC set to  0.000000
3/15/2011	12:30:36 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:30:36 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:30:37 PM	Tube furnace set to 0
3/15/2011	12:31:09 PM	Helium valve closed
3/15/2011	12:31:09 PM	H2 valve closed
3/15/2011	12:31:09 PM	BCl3 valve closed
3/15/2011	12:31:09 PM	PH3 valve closed
3/15/2011	12:31:09 PM	SiCl4 pre valve closed
3/15/2011	12:31:09 PM	SiCl4 post valve closed
3/15/2011	12:31:09 PM	Bubbler valve closed
3/15/2011	12:31:09 PM	Main Vac valve opened
3/15/2011	12:31:09 PM	Bypass valve opened
3/15/2011	12:31:09 PM	Helium MFC set to  0.000000
3/15/2011	12:31:09 PM	H2 MFC set to  0.000000
3/15/2011	12:31:09 PM	BCl3 MFC set to  0.000000
3/15/2011	12:31:09 PM	PHl3 MFC set to  0.000000
3/15/2011	12:31:09 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:31:09 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:31:10 PM	Tube furnace set to 0
3/15/2011	12:31:10 PM	Run finished at 12:31 PM
3/15/2011	12:31:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	12:33:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/15/2011	12:33:49 PM	Recipe started at 12:33 PM
3/15/2011	12:33:49 PM	Helium valve closed
3/15/2011	12:33:49 PM	H2 valve closed
3/15/2011	12:33:49 PM	BCl3 valve closed
3/15/2011	12:33:49 PM	PH3 valve closed
3/15/2011	12:33:50 PM	SiCl4 pre valve closed
3/15/2011	12:33:50 PM	SiCl4 post valve closed
3/15/2011	12:33:50 PM	Main Vac valve closed
3/15/2011	12:33:50 PM	Bubbler valve closed
3/15/2011	12:33:50 PM	Bypass valve opened
3/15/2011	12:33:50 PM	Helium MFC set to  0.000000
3/15/2011	12:33:50 PM	H2 MFC set to  0.000000
3/15/2011	12:33:50 PM	BCl3 MFC set to  0.000000
3/15/2011	12:33:50 PM	PHl3 MFC set to  0.000000
3/15/2011	12:33:50 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:33:50 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:33:50 PM	Tube furnace set to 0
3/15/2011	12:33:50 PM	Helium valve closed
3/15/2011	12:33:50 PM	H2 valve closed
3/15/2011	12:33:50 PM	BCl3 valve closed
3/15/2011	12:33:50 PM	PH3 valve closed
3/15/2011	12:33:50 PM	SiCl4 pre valve closed
3/15/2011	12:33:50 PM	SiCl4 post valve closed
3/15/2011	12:33:50 PM	Bubbler valve closed
3/15/2011	12:33:50 PM	Main Vac valve opened
3/15/2011	12:33:50 PM	Bypass valve opened
3/15/2011	12:33:50 PM	Helium MFC set to  0.000000
3/15/2011	12:33:50 PM	H2 MFC set to  0.000000
3/15/2011	12:33:50 PM	BCl3 MFC set to  0.000000
3/15/2011	12:33:50 PM	PHl3 MFC set to  0.000000
3/15/2011	12:33:50 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:33:50 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:33:50 PM	Tube furnace set to 0
3/15/2011	12:34:50 PM	H2 valve closed
3/15/2011	12:34:50 PM	BCl3 valve closed
3/15/2011	12:34:50 PM	PH3 valve closed
3/15/2011	12:34:50 PM	SiCl4 pre valve closed
3/15/2011	12:34:50 PM	SiCl4 post valve closed
3/15/2011	12:34:50 PM	Bubbler valve closed
3/15/2011	12:34:50 PM	Helium valve opened
3/15/2011	12:34:50 PM	Main Vac valve opened
3/15/2011	12:34:50 PM	Bypass valve opened
3/15/2011	12:34:50 PM	Helium MFC set to  100.000000
3/15/2011	12:34:50 PM	H2 MFC set to  0.000000
3/15/2011	12:34:50 PM	BCl3 MFC set to  0.000000
3/15/2011	12:34:50 PM	PHl3 MFC set to  0.000000
3/15/2011	12:34:50 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:34:50 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:34:50 PM	Tube furnace set to 0
3/15/2011	12:35:50 PM	Helium valve closed
3/15/2011	12:35:50 PM	H2 valve closed
3/15/2011	12:35:50 PM	BCl3 valve closed
3/15/2011	12:35:50 PM	PH3 valve closed
3/15/2011	12:35:50 PM	SiCl4 pre valve closed
3/15/2011	12:35:50 PM	SiCl4 post valve closed
3/15/2011	12:35:50 PM	Bubbler valve closed
3/15/2011	12:35:50 PM	Main Vac valve opened
3/15/2011	12:35:50 PM	Bypass valve opened
3/15/2011	12:35:50 PM	Helium MFC set to  0.000000
3/15/2011	12:35:50 PM	H2 MFC set to  0.000000
3/15/2011	12:35:50 PM	BCl3 MFC set to  0.000000
3/15/2011	12:35:50 PM	PHl3 MFC set to  0.000000
3/15/2011	12:35:50 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:35:50 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:35:51 PM	Tube furnace set to 0
3/15/2011	12:36:32 PM	Run aborted at 12:36 PM
3/15/2011	12:36:32 PM	Helium valve closed
3/15/2011	12:36:32 PM	H2 valve closed
3/15/2011	12:36:32 PM	BCl3 valve closed
3/15/2011	12:36:32 PM	PH3 valve closed
3/15/2011	12:36:32 PM	SiCl4 pre valve closed
3/15/2011	12:36:32 PM	SiCl4 post valve closed
3/15/2011	12:36:32 PM	Bypass valve closed
3/15/2011	12:36:32 PM	Main Vac valve closed
3/15/2011	12:36:32 PM	Bubbler valve closed
3/15/2011	12:36:32 PM	Helium MFC set to  0.000000
3/15/2011	12:36:32 PM	H2 MFC set to  0.000000
3/15/2011	12:36:32 PM	BCl3 MFC set to  0.000000
3/15/2011	12:36:32 PM	PHl3 MFC set to  0.000000
3/15/2011	12:36:32 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:36:32 PM	Tube furnace set to 0
3/15/2011	12:36:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/15/2011	12:36:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	12:36:43 PM	Recipe started at 12:36 PM
3/15/2011	12:36:43 PM	Helium valve closed
3/15/2011	12:36:43 PM	H2 valve closed
3/15/2011	12:36:43 PM	BCl3 valve closed
3/15/2011	12:36:43 PM	PH3 valve closed
3/15/2011	12:36:43 PM	SiCl4 pre valve closed
3/15/2011	12:36:43 PM	SiCl4 post valve closed
3/15/2011	12:36:43 PM	Main Vac valve closed
3/15/2011	12:36:43 PM	Bubbler valve closed
3/15/2011	12:36:43 PM	Bypass valve opened
3/15/2011	12:36:43 PM	Helium MFC set to  0.000000
3/15/2011	12:36:43 PM	H2 MFC set to  0.000000
3/15/2011	12:36:43 PM	BCl3 MFC set to  0.000000
3/15/2011	12:36:43 PM	PHl3 MFC set to  0.000000
3/15/2011	12:36:43 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:36:43 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:36:43 PM	Tube furnace set to 0
3/15/2011	12:36:43 PM	Helium valve closed
3/15/2011	12:36:43 PM	H2 valve closed
3/15/2011	12:36:43 PM	BCl3 valve closed
3/15/2011	12:36:43 PM	PH3 valve closed
3/15/2011	12:36:43 PM	SiCl4 pre valve closed
3/15/2011	12:36:43 PM	SiCl4 post valve closed
3/15/2011	12:36:43 PM	Bubbler valve closed
3/15/2011	12:36:43 PM	Main Vac valve opened
3/15/2011	12:36:43 PM	Bypass valve opened
3/15/2011	12:36:43 PM	Helium MFC set to  0.000000
3/15/2011	12:36:43 PM	H2 MFC set to  0.000000
3/15/2011	12:36:43 PM	BCl3 MFC set to  0.000000
3/15/2011	12:36:43 PM	PHl3 MFC set to  0.000000
3/15/2011	12:36:43 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:36:43 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:36:44 PM	Tube furnace set to 0
3/15/2011	12:36:44 PM	Run finished at 12:36 PM
3/15/2011	12:36:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	12:37:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/15/2011	12:37:53 PM	Recipe started at 12:37 PM
3/15/2011	12:37:53 PM	Helium valve closed
3/15/2011	12:37:53 PM	H2 valve closed
3/15/2011	12:37:53 PM	BCl3 valve closed
3/15/2011	12:37:53 PM	PH3 valve closed
3/15/2011	12:37:53 PM	SiCl4 pre valve closed
3/15/2011	12:37:53 PM	SiCl4 post valve closed
3/15/2011	12:37:53 PM	Main Vac valve closed
3/15/2011	12:37:53 PM	Bubbler valve closed
3/15/2011	12:37:53 PM	Bypass valve opened
3/15/2011	12:37:53 PM	Helium MFC set to  0.000000
3/15/2011	12:37:53 PM	H2 MFC set to  0.000000
3/15/2011	12:37:53 PM	BCl3 MFC set to  0.000000
3/15/2011	12:37:53 PM	PHl3 MFC set to  0.000000
3/15/2011	12:37:53 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:37:53 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:37:54 PM	Tube furnace set to 0
3/15/2011	12:37:54 PM	Helium valve closed
3/15/2011	12:37:54 PM	H2 valve closed
3/15/2011	12:37:54 PM	BCl3 valve closed
3/15/2011	12:37:54 PM	PH3 valve closed
3/15/2011	12:37:54 PM	SiCl4 pre valve closed
3/15/2011	12:37:54 PM	SiCl4 post valve closed
3/15/2011	12:37:54 PM	Bubbler valve closed
3/15/2011	12:37:54 PM	Main Vac valve opened
3/15/2011	12:37:54 PM	Bypass valve opened
3/15/2011	12:37:54 PM	Helium MFC set to  0.000000
3/15/2011	12:37:54 PM	H2 MFC set to  0.000000
3/15/2011	12:37:54 PM	BCl3 MFC set to  0.000000
3/15/2011	12:37:54 PM	PHl3 MFC set to  0.000000
3/15/2011	12:37:54 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:37:54 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:37:54 PM	Tube furnace set to 0
3/15/2011	12:38:54 PM	H2 valve closed
3/15/2011	12:38:54 PM	BCl3 valve closed
3/15/2011	12:38:54 PM	PH3 valve closed
3/15/2011	12:38:54 PM	SiCl4 pre valve closed
3/15/2011	12:38:54 PM	SiCl4 post valve closed
3/15/2011	12:38:54 PM	Bubbler valve closed
3/15/2011	12:38:54 PM	Helium valve opened
3/15/2011	12:38:54 PM	Main Vac valve opened
3/15/2011	12:38:54 PM	Bypass valve opened
3/15/2011	12:38:54 PM	Helium MFC set to  100.000000
3/15/2011	12:38:54 PM	H2 MFC set to  0.000000
3/15/2011	12:38:54 PM	BCl3 MFC set to  0.000000
3/15/2011	12:38:54 PM	PHl3 MFC set to  0.000000
3/15/2011	12:38:54 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:38:54 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:38:54 PM	Tube furnace set to 0
3/15/2011	12:39:54 PM	Helium valve closed
3/15/2011	12:39:54 PM	H2 valve closed
3/15/2011	12:39:54 PM	BCl3 valve closed
3/15/2011	12:39:54 PM	PH3 valve closed
3/15/2011	12:39:54 PM	SiCl4 pre valve closed
3/15/2011	12:39:54 PM	SiCl4 post valve closed
3/15/2011	12:39:54 PM	Bubbler valve closed
3/15/2011	12:39:54 PM	Main Vac valve opened
3/15/2011	12:39:54 PM	Bypass valve opened
3/15/2011	12:39:54 PM	Helium MFC set to  0.000000
3/15/2011	12:39:54 PM	H2 MFC set to  0.000000
3/15/2011	12:39:54 PM	BCl3 MFC set to  0.000000
3/15/2011	12:39:54 PM	PHl3 MFC set to  0.000000
3/15/2011	12:39:54 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:39:54 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:39:54 PM	Tube furnace set to 0
3/15/2011	12:40:54 PM	H2 valve closed
3/15/2011	12:40:54 PM	BCl3 valve closed
3/15/2011	12:40:54 PM	PH3 valve closed
3/15/2011	12:40:54 PM	SiCl4 pre valve closed
3/15/2011	12:40:54 PM	SiCl4 post valve closed
3/15/2011	12:40:54 PM	Bubbler valve closed
3/15/2011	12:40:54 PM	Helium valve opened
3/15/2011	12:40:54 PM	Main Vac valve opened
3/15/2011	12:40:54 PM	Bypass valve opened
3/15/2011	12:40:54 PM	Helium MFC set to  100.000000
3/15/2011	12:40:54 PM	H2 MFC set to  0.000000
3/15/2011	12:40:54 PM	BCl3 MFC set to  0.000000
3/15/2011	12:40:54 PM	PHl3 MFC set to  0.000000
3/15/2011	12:40:54 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:40:54 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:40:55 PM	Tube furnace set to 0
3/15/2011	12:41:55 PM	Helium valve closed
3/15/2011	12:41:55 PM	H2 valve closed
3/15/2011	12:41:55 PM	BCl3 valve closed
3/15/2011	12:41:55 PM	PH3 valve closed
3/15/2011	12:41:55 PM	SiCl4 pre valve closed
3/15/2011	12:41:55 PM	SiCl4 post valve closed
3/15/2011	12:41:55 PM	Bubbler valve closed
3/15/2011	12:41:55 PM	Main Vac valve opened
3/15/2011	12:41:55 PM	Bypass valve opened
3/15/2011	12:41:55 PM	Helium MFC set to  0.000000
3/15/2011	12:41:55 PM	H2 MFC set to  0.000000
3/15/2011	12:41:55 PM	BCl3 MFC set to  0.000000
3/15/2011	12:41:55 PM	PHl3 MFC set to  0.000000
3/15/2011	12:41:55 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:41:55 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:41:55 PM	Tube furnace set to 0
3/15/2011	12:42:55 PM	H2 valve closed
3/15/2011	12:42:55 PM	BCl3 valve closed
3/15/2011	12:42:55 PM	PH3 valve closed
3/15/2011	12:42:55 PM	SiCl4 pre valve closed
3/15/2011	12:42:55 PM	SiCl4 post valve closed
3/15/2011	12:42:55 PM	Bubbler valve closed
3/15/2011	12:42:55 PM	Helium valve opened
3/15/2011	12:42:55 PM	Main Vac valve opened
3/15/2011	12:42:55 PM	Bypass valve opened
3/15/2011	12:42:55 PM	Helium MFC set to  100.000000
3/15/2011	12:42:55 PM	H2 MFC set to  0.000000
3/15/2011	12:42:55 PM	BCl3 MFC set to  0.000000
3/15/2011	12:42:55 PM	PHl3 MFC set to  0.000000
3/15/2011	12:42:55 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:42:55 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:42:55 PM	Tube furnace set to 0
3/15/2011	12:43:55 PM	Helium valve closed
3/15/2011	12:43:55 PM	H2 valve closed
3/15/2011	12:43:55 PM	BCl3 valve closed
3/15/2011	12:43:55 PM	PH3 valve closed
3/15/2011	12:43:55 PM	SiCl4 pre valve closed
3/15/2011	12:43:55 PM	SiCl4 post valve closed
3/15/2011	12:43:55 PM	Bubbler valve closed
3/15/2011	12:43:55 PM	Main Vac valve opened
3/15/2011	12:43:55 PM	Bypass valve opened
3/15/2011	12:43:55 PM	Helium MFC set to  0.000000
3/15/2011	12:43:55 PM	H2 MFC set to  0.000000
3/15/2011	12:43:55 PM	BCl3 MFC set to  0.000000
3/15/2011	12:43:55 PM	PHl3 MFC set to  0.000000
3/15/2011	12:43:55 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:43:55 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:43:55 PM	Tube furnace set to 0
3/15/2011	12:44:55 PM	H2 valve closed
3/15/2011	12:44:55 PM	BCl3 valve closed
3/15/2011	12:44:55 PM	PH3 valve closed
3/15/2011	12:44:55 PM	SiCl4 pre valve closed
3/15/2011	12:44:55 PM	SiCl4 post valve closed
3/15/2011	12:44:55 PM	Bubbler valve closed
3/15/2011	12:44:55 PM	Helium valve opened
3/15/2011	12:44:55 PM	Main Vac valve opened
3/15/2011	12:44:55 PM	Bypass valve opened
3/15/2011	12:44:55 PM	Helium MFC set to  100.000000
3/15/2011	12:44:55 PM	H2 MFC set to  0.000000
3/15/2011	12:44:55 PM	BCl3 MFC set to  0.000000
3/15/2011	12:44:55 PM	PHl3 MFC set to  0.000000
3/15/2011	12:44:55 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:44:55 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:44:55 PM	Tube furnace set to 0
3/15/2011	12:45:55 PM	Helium valve closed
3/15/2011	12:45:55 PM	H2 valve closed
3/15/2011	12:45:55 PM	BCl3 valve closed
3/15/2011	12:45:55 PM	PH3 valve closed
3/15/2011	12:45:55 PM	SiCl4 pre valve closed
3/15/2011	12:45:55 PM	SiCl4 post valve closed
3/15/2011	12:45:55 PM	Bubbler valve closed
3/15/2011	12:45:55 PM	Main Vac valve opened
3/15/2011	12:45:55 PM	Bypass valve opened
3/15/2011	12:45:55 PM	Helium MFC set to  0.000000
3/15/2011	12:45:55 PM	H2 MFC set to  0.000000
3/15/2011	12:45:55 PM	BCl3 MFC set to  0.000000
3/15/2011	12:45:55 PM	PHl3 MFC set to  0.000000
3/15/2011	12:45:55 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:45:55 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:45:56 PM	Tube furnace set to 0
3/15/2011	12:46:56 PM	H2 valve closed
3/15/2011	12:46:56 PM	BCl3 valve closed
3/15/2011	12:46:56 PM	PH3 valve closed
3/15/2011	12:46:56 PM	SiCl4 pre valve closed
3/15/2011	12:46:56 PM	SiCl4 post valve closed
3/15/2011	12:46:56 PM	Bubbler valve closed
3/15/2011	12:46:56 PM	Helium valve opened
3/15/2011	12:46:56 PM	Main Vac valve opened
3/15/2011	12:46:56 PM	Bypass valve opened
3/15/2011	12:46:56 PM	Helium MFC set to  100.000000
3/15/2011	12:46:56 PM	H2 MFC set to  0.000000
3/15/2011	12:46:56 PM	BCl3 MFC set to  0.000000
3/15/2011	12:46:56 PM	PHl3 MFC set to  0.000000
3/15/2011	12:46:56 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:46:56 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:46:56 PM	Tube furnace set to 0
3/15/2011	12:47:56 PM	Helium valve closed
3/15/2011	12:47:56 PM	H2 valve closed
3/15/2011	12:47:56 PM	BCl3 valve closed
3/15/2011	12:47:56 PM	PH3 valve closed
3/15/2011	12:47:56 PM	SiCl4 pre valve closed
3/15/2011	12:47:56 PM	SiCl4 post valve closed
3/15/2011	12:47:56 PM	Bubbler valve closed
3/15/2011	12:47:56 PM	Main Vac valve opened
3/15/2011	12:47:56 PM	Bypass valve opened
3/15/2011	12:47:56 PM	Helium MFC set to  0.000000
3/15/2011	12:47:56 PM	H2 MFC set to  0.000000
3/15/2011	12:47:56 PM	BCl3 MFC set to  0.000000
3/15/2011	12:47:56 PM	PHl3 MFC set to  0.000000
3/15/2011	12:47:56 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:47:56 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:47:56 PM	Tube furnace set to 0
3/15/2011	12:48:56 PM	H2 valve closed
3/15/2011	12:48:56 PM	BCl3 valve closed
3/15/2011	12:48:56 PM	PH3 valve closed
3/15/2011	12:48:56 PM	SiCl4 pre valve closed
3/15/2011	12:48:56 PM	SiCl4 post valve closed
3/15/2011	12:48:56 PM	Bubbler valve closed
3/15/2011	12:48:56 PM	Helium valve opened
3/15/2011	12:48:56 PM	Main Vac valve opened
3/15/2011	12:48:56 PM	Bypass valve opened
3/15/2011	12:48:56 PM	Helium MFC set to  100.000000
3/15/2011	12:48:56 PM	H2 MFC set to  0.000000
3/15/2011	12:48:56 PM	BCl3 MFC set to  0.000000
3/15/2011	12:48:56 PM	PHl3 MFC set to  0.000000
3/15/2011	12:48:56 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:48:56 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:48:56 PM	Tube furnace set to 0
3/15/2011	12:49:56 PM	Helium valve closed
3/15/2011	12:49:56 PM	H2 valve closed
3/15/2011	12:49:56 PM	BCl3 valve closed
3/15/2011	12:49:56 PM	PH3 valve closed
3/15/2011	12:49:56 PM	SiCl4 pre valve closed
3/15/2011	12:49:56 PM	SiCl4 post valve closed
3/15/2011	12:49:56 PM	Bubbler valve closed
3/15/2011	12:49:56 PM	Main Vac valve opened
3/15/2011	12:49:56 PM	Bypass valve opened
3/15/2011	12:49:56 PM	Helium MFC set to  0.000000
3/15/2011	12:49:56 PM	H2 MFC set to  0.000000
3/15/2011	12:49:56 PM	BCl3 MFC set to  0.000000
3/15/2011	12:49:56 PM	PHl3 MFC set to  0.000000
3/15/2011	12:49:56 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:49:56 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:49:56 PM	Tube furnace set to 0
3/15/2011	12:50:56 PM	H2 valve closed
3/15/2011	12:50:56 PM	BCl3 valve closed
3/15/2011	12:50:56 PM	PH3 valve closed
3/15/2011	12:50:56 PM	SiCl4 pre valve closed
3/15/2011	12:50:56 PM	SiCl4 post valve closed
3/15/2011	12:50:56 PM	Bubbler valve closed
3/15/2011	12:50:56 PM	Helium valve opened
3/15/2011	12:50:56 PM	Main Vac valve opened
3/15/2011	12:50:56 PM	Bypass valve opened
3/15/2011	12:50:56 PM	Helium MFC set to  100.000000
3/15/2011	12:50:56 PM	H2 MFC set to  0.000000
3/15/2011	12:50:56 PM	BCl3 MFC set to  0.000000
3/15/2011	12:50:56 PM	PHl3 MFC set to  0.000000
3/15/2011	12:50:56 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:50:56 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:50:57 PM	Tube furnace set to 0
3/15/2011	12:51:57 PM	Helium valve closed
3/15/2011	12:51:57 PM	H2 valve closed
3/15/2011	12:51:57 PM	BCl3 valve closed
3/15/2011	12:51:57 PM	PH3 valve closed
3/15/2011	12:51:57 PM	SiCl4 pre valve closed
3/15/2011	12:51:57 PM	SiCl4 post valve closed
3/15/2011	12:51:57 PM	Bubbler valve closed
3/15/2011	12:51:57 PM	Main Vac valve opened
3/15/2011	12:51:57 PM	Bypass valve opened
3/15/2011	12:51:57 PM	Helium MFC set to  0.000000
3/15/2011	12:51:57 PM	H2 MFC set to  0.000000
3/15/2011	12:51:57 PM	BCl3 MFC set to  0.000000
3/15/2011	12:51:57 PM	PHl3 MFC set to  0.000000
3/15/2011	12:51:57 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:51:57 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:51:57 PM	Tube furnace set to 0
3/15/2011	12:52:57 PM	H2 valve closed
3/15/2011	12:52:57 PM	BCl3 valve closed
3/15/2011	12:52:57 PM	PH3 valve closed
3/15/2011	12:52:57 PM	SiCl4 pre valve closed
3/15/2011	12:52:57 PM	SiCl4 post valve closed
3/15/2011	12:52:57 PM	Bubbler valve closed
3/15/2011	12:52:57 PM	Helium valve opened
3/15/2011	12:52:57 PM	Main Vac valve opened
3/15/2011	12:52:57 PM	Bypass valve opened
3/15/2011	12:52:57 PM	Helium MFC set to  100.000000
3/15/2011	12:52:57 PM	H2 MFC set to  0.000000
3/15/2011	12:52:57 PM	BCl3 MFC set to  0.000000
3/15/2011	12:52:57 PM	PHl3 MFC set to  0.000000
3/15/2011	12:52:57 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:52:57 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:52:57 PM	Tube furnace set to 0
3/15/2011	12:53:57 PM	Helium valve closed
3/15/2011	12:53:57 PM	H2 valve closed
3/15/2011	12:53:57 PM	BCl3 valve closed
3/15/2011	12:53:57 PM	PH3 valve closed
3/15/2011	12:53:57 PM	SiCl4 pre valve closed
3/15/2011	12:53:57 PM	SiCl4 post valve closed
3/15/2011	12:53:57 PM	Bubbler valve closed
3/15/2011	12:53:57 PM	Main Vac valve opened
3/15/2011	12:53:57 PM	Bypass valve opened
3/15/2011	12:53:57 PM	Helium MFC set to  0.000000
3/15/2011	12:53:57 PM	H2 MFC set to  0.000000
3/15/2011	12:53:57 PM	BCl3 MFC set to  0.000000
3/15/2011	12:53:57 PM	PHl3 MFC set to  0.000000
3/15/2011	12:53:57 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:53:57 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:53:57 PM	Tube furnace set to 0
3/15/2011	12:54:57 PM	H2 valve closed
3/15/2011	12:54:57 PM	BCl3 valve closed
3/15/2011	12:54:57 PM	PH3 valve closed
3/15/2011	12:54:57 PM	SiCl4 pre valve closed
3/15/2011	12:54:57 PM	SiCl4 post valve closed
3/15/2011	12:54:57 PM	Bubbler valve closed
3/15/2011	12:54:57 PM	Helium valve opened
3/15/2011	12:54:57 PM	Main Vac valve opened
3/15/2011	12:54:57 PM	Bypass valve opened
3/15/2011	12:54:57 PM	Helium MFC set to  100.000000
3/15/2011	12:54:57 PM	H2 MFC set to  0.000000
3/15/2011	12:54:57 PM	BCl3 MFC set to  0.000000
3/15/2011	12:54:57 PM	PHl3 MFC set to  0.000000
3/15/2011	12:54:57 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:54:57 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:54:57 PM	Tube furnace set to 0
3/15/2011	12:55:57 PM	Helium valve closed
3/15/2011	12:55:57 PM	H2 valve closed
3/15/2011	12:55:57 PM	BCl3 valve closed
3/15/2011	12:55:57 PM	PH3 valve closed
3/15/2011	12:55:57 PM	SiCl4 pre valve closed
3/15/2011	12:55:57 PM	SiCl4 post valve closed
3/15/2011	12:55:57 PM	Bubbler valve closed
3/15/2011	12:55:57 PM	Main Vac valve opened
3/15/2011	12:55:57 PM	Bypass valve opened
3/15/2011	12:55:57 PM	Helium MFC set to  0.000000
3/15/2011	12:55:57 PM	H2 MFC set to  0.000000
3/15/2011	12:55:57 PM	BCl3 MFC set to  0.000000
3/15/2011	12:55:57 PM	PHl3 MFC set to  0.000000
3/15/2011	12:55:57 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:55:57 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:55:58 PM	Tube furnace set to 0
3/15/2011	12:56:58 PM	H2 valve closed
3/15/2011	12:56:58 PM	BCl3 valve closed
3/15/2011	12:56:58 PM	PH3 valve closed
3/15/2011	12:56:58 PM	SiCl4 pre valve closed
3/15/2011	12:56:58 PM	SiCl4 post valve closed
3/15/2011	12:56:58 PM	Bubbler valve closed
3/15/2011	12:56:58 PM	Helium valve opened
3/15/2011	12:56:58 PM	Main Vac valve opened
3/15/2011	12:56:58 PM	Bypass valve opened
3/15/2011	12:56:58 PM	Helium MFC set to  100.000000
3/15/2011	12:56:58 PM	H2 MFC set to  0.000000
3/15/2011	12:56:58 PM	BCl3 MFC set to  0.000000
3/15/2011	12:56:58 PM	PHl3 MFC set to  0.000000
3/15/2011	12:56:58 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:56:58 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:56:58 PM	Tube furnace set to 0
3/15/2011	12:57:58 PM	Helium valve closed
3/15/2011	12:57:58 PM	H2 valve closed
3/15/2011	12:57:58 PM	BCl3 valve closed
3/15/2011	12:57:58 PM	PH3 valve closed
3/15/2011	12:57:58 PM	SiCl4 pre valve closed
3/15/2011	12:57:58 PM	SiCl4 post valve closed
3/15/2011	12:57:58 PM	Bubbler valve closed
3/15/2011	12:57:58 PM	Main Vac valve opened
3/15/2011	12:57:58 PM	Bypass valve opened
3/15/2011	12:57:58 PM	Helium MFC set to  0.000000
3/15/2011	12:57:58 PM	H2 MFC set to  0.000000
3/15/2011	12:57:58 PM	BCl3 MFC set to  0.000000
3/15/2011	12:57:58 PM	PHl3 MFC set to  0.000000
3/15/2011	12:57:58 PM	SiCl4 MFC set to  0.000000
3/15/2011	12:57:58 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	12:57:58 PM	Tube furnace set to 0
3/15/2011	12:57:59 PM	Run finished at 12:57 PM
3/15/2011	12:57:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/15/2011	12:59:40 PM	Helium MFC set to  50.000000
3/15/2011	12:59:41 PM	Helium valve opened
3/15/2011	1:00:35 PM	Helium MFC set to  50.000000
3/15/2011	1:01:24 PM	Helium MFC set to  0.000000
3/15/2011	1:01:25 PM	Helium valve closed
3/15/2011	1:02:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/15/2011	1:02:15 PM	Recipe started at 1:02 PM
3/15/2011	1:02:15 PM	Helium valve closed
3/15/2011	1:02:15 PM	H2 valve closed
3/15/2011	1:02:15 PM	BCl3 valve closed
3/15/2011	1:02:15 PM	PH3 valve closed
3/15/2011	1:02:15 PM	SiCl4 pre valve closed
3/15/2011	1:02:15 PM	SiCl4 post valve closed
3/15/2011	1:02:15 PM	Main Vac valve closed
3/15/2011	1:02:15 PM	Bypass valve closed
3/15/2011	1:02:15 PM	Bubbler valve closed
3/15/2011	1:02:15 PM	Helium MFC set to  0.000000
3/15/2011	1:02:15 PM	H2 MFC set to  0.000000
3/15/2011	1:02:15 PM	BCl3 MFC set to  0.000000
3/15/2011	1:02:15 PM	PHl3 MFC set to  0.000000
3/15/2011	1:02:15 PM	SiCl4 MFC set to  0.000000
3/15/2011	1:02:15 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	1:02:15 PM	Tube furnace set to 0
3/15/2011	1:02:16 PM	Run finished at 1:02 PM
3/15/2011	1:02:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/15/2011	1:02:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	1:02:42 PM	Recipe started at 1:02 PM
3/15/2011	1:02:42 PM	Helium valve closed
3/15/2011	1:02:42 PM	H2 valve closed
3/15/2011	1:02:42 PM	BCl3 valve closed
3/15/2011	1:02:42 PM	PH3 valve closed
3/15/2011	1:02:42 PM	SiCl4 pre valve closed
3/15/2011	1:02:42 PM	SiCl4 post valve closed
3/15/2011	1:02:42 PM	Main Vac valve closed
3/15/2011	1:02:42 PM	Bubbler valve closed
3/15/2011	1:02:42 PM	Bypass valve opened
3/15/2011	1:02:42 PM	Helium MFC set to  0.000000
3/15/2011	1:02:42 PM	H2 MFC set to  0.000000
3/15/2011	1:02:42 PM	BCl3 MFC set to  0.000000
3/15/2011	1:02:42 PM	PHl3 MFC set to  0.000000
3/15/2011	1:02:42 PM	SiCl4 MFC set to  0.000000
3/15/2011	1:02:42 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	1:02:42 PM	Tube furnace set to 0
3/15/2011	1:02:42 PM	Helium valve closed
3/15/2011	1:02:42 PM	H2 valve closed
3/15/2011	1:02:42 PM	BCl3 valve closed
3/15/2011	1:02:42 PM	PH3 valve closed
3/15/2011	1:02:42 PM	SiCl4 pre valve closed
3/15/2011	1:02:42 PM	SiCl4 post valve closed
3/15/2011	1:02:42 PM	Bubbler valve closed
3/15/2011	1:02:42 PM	Main Vac valve opened
3/15/2011	1:02:42 PM	Bypass valve opened
3/15/2011	1:02:42 PM	Helium MFC set to  0.000000
3/15/2011	1:02:42 PM	H2 MFC set to  0.000000
3/15/2011	1:02:42 PM	BCl3 MFC set to  0.000000
3/15/2011	1:02:42 PM	PHl3 MFC set to  0.000000
3/15/2011	1:02:42 PM	SiCl4 MFC set to  0.000000
3/15/2011	1:02:42 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	1:02:43 PM	Tube furnace set to 0
3/15/2011	1:02:43 PM	Run finished at 1:02 PM
3/15/2011	1:02:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	1:02:58 PM	Helium MFC set to  50.000000
3/15/2011	1:02:59 PM	Helium valve opened
3/15/2011	1:03:28 PM	Helium MFC set to  0.000000
3/15/2011	1:03:30 PM	Helium valve closed
3/15/2011	1:04:22 PM	Recipe started at 1:04 PM
3/15/2011	1:04:22 PM	Helium valve closed
3/15/2011	1:04:22 PM	BCl3 valve closed
3/15/2011	1:04:22 PM	PH3 valve closed
3/15/2011	1:04:22 PM	SiCl4 pre valve closed
3/15/2011	1:04:22 PM	SiCl4 post valve closed
3/15/2011	1:04:22 PM	Main Vac valve closed
3/15/2011	1:04:22 PM	Bypass valve closed
3/15/2011	1:04:22 PM	Bubbler valve closed
3/15/2011	1:04:22 PM	H2 valve opened
3/15/2011	1:04:22 PM	Helium MFC set to  0.000000
3/15/2011	1:04:22 PM	H2 MFC set to  500.000000
3/15/2011	1:04:22 PM	BCl3 MFC set to  0.000000
3/15/2011	1:04:22 PM	PHl3 MFC set to  0.000000
3/15/2011	1:04:22 PM	SiCl4 MFC set to  0.000000
3/15/2011	1:04:22 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	1:04:22 PM	Tube furnace set to 0
3/15/2011	1:05:42 PM	Helium valve closed
3/15/2011	1:05:42 PM	BCl3 valve closed
3/15/2011	1:05:42 PM	PH3 valve closed
3/15/2011	1:05:42 PM	SiCl4 pre valve closed
3/15/2011	1:05:42 PM	SiCl4 post valve closed
3/15/2011	1:05:42 PM	Main Vac valve closed
3/15/2011	1:05:42 PM	Bypass valve closed
3/15/2011	1:05:42 PM	H2 valve opened
3/15/2011	1:05:42 PM	Bubbler valve opened
3/15/2011	1:05:42 PM	Helium MFC set to  0.000000
3/15/2011	1:05:42 PM	H2 MFC set to  500.000000
3/15/2011	1:05:42 PM	BCl3 MFC set to  0.000000
3/15/2011	1:05:42 PM	PHl3 MFC set to  0.000000
3/15/2011	1:05:42 PM	SiCl4 MFC set to  0.000000
3/15/2011	1:05:43 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	1:05:43 PM	Tube furnace set to 1000
3/15/2011	1:25:43 PM	Helium valve closed
3/15/2011	1:25:43 PM	PH3 valve closed
3/15/2011	1:25:43 PM	Main Vac valve closed
3/15/2011	1:25:43 PM	Bypass valve closed
3/15/2011	1:25:43 PM	H2 valve opened
3/15/2011	1:25:43 PM	BCl3 valve opened
3/15/2011	1:25:43 PM	SiCl4 pre valve opened
3/15/2011	1:25:43 PM	SiCl4 post valve opened
3/15/2011	1:25:43 PM	Bubbler valve opened
3/15/2011	1:25:43 PM	Helium MFC set to  0.000000
3/15/2011	1:25:43 PM	H2 MFC set to  500.000000
3/15/2011	1:25:43 PM	BCl3 MFC set to  2.500000
3/15/2011	1:25:43 PM	PHl3 MFC set to  0.000000
3/15/2011	1:25:43 PM	SiCl4 MFC set to  50.000000
3/15/2011	1:25:43 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	1:25:43 PM	Tube furnace set to 1000
3/15/2011	1:45:43 PM	H2 valve closed
3/15/2011	1:45:43 PM	BCl3 valve closed
3/15/2011	1:45:43 PM	PH3 valve closed
3/15/2011	1:45:43 PM	SiCl4 pre valve closed
3/15/2011	1:45:43 PM	SiCl4 post valve closed
3/15/2011	1:45:43 PM	Main Vac valve closed
3/15/2011	1:45:43 PM	Bypass valve closed
3/15/2011	1:45:43 PM	Helium valve opened
3/15/2011	1:45:43 PM	Bubbler valve opened
3/15/2011	1:45:43 PM	Helium MFC set to  500.000000
3/15/2011	1:45:43 PM	H2 MFC set to  0.000000
3/15/2011	1:45:43 PM	BCl3 MFC set to  0.000000
3/15/2011	1:45:43 PM	PHl3 MFC set to  0.000000
3/15/2011	1:45:43 PM	SiCl4 MFC set to  0.000000
3/15/2011	1:45:43 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	1:45:43 PM	Tube furnace set to 0
3/15/2011	2:05:43 PM	Helium valve closed
3/15/2011	2:05:43 PM	H2 valve closed
3/15/2011	2:05:43 PM	BCl3 valve closed
3/15/2011	2:05:43 PM	PH3 valve closed
3/15/2011	2:05:43 PM	SiCl4 pre valve closed
3/15/2011	2:05:43 PM	SiCl4 post valve closed
3/15/2011	2:05:43 PM	Main Vac valve closed
3/15/2011	2:05:43 PM	Bypass valve closed
3/15/2011	2:05:43 PM	Bubbler valve closed
3/15/2011	2:05:43 PM	Helium MFC set to  0.000000
3/15/2011	2:05:43 PM	H2 MFC set to  0.000000
3/15/2011	2:05:43 PM	BCl3 MFC set to  0.000000
3/15/2011	2:05:43 PM	PHl3 MFC set to  0.000000
3/15/2011	2:05:43 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:05:43 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:05:43 PM	Tube furnace set to 0
3/15/2011	2:05:43 PM	Run finished at 2:05 PM
3/15/2011	2:26:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2011	2:26:48 PM	Recipe started at 2:26 PM
3/15/2011	2:26:48 PM	H2 valve closed
3/15/2011	2:26:48 PM	BCl3 valve closed
3/15/2011	2:26:48 PM	PH3 valve closed
3/15/2011	2:26:48 PM	SiCl4 pre valve closed
3/15/2011	2:26:48 PM	SiCl4 post valve closed
3/15/2011	2:26:48 PM	Main Vac valve closed
3/15/2011	2:26:48 PM	Bypass valve closed
3/15/2011	2:26:48 PM	Bubbler valve closed
3/15/2011	2:26:48 PM	Helium valve opened
3/15/2011	2:26:48 PM	Helium MFC set to  500.000000
3/15/2011	2:26:48 PM	H2 MFC set to  0.000000
3/15/2011	2:26:48 PM	BCl3 MFC set to  0.000000
3/15/2011	2:26:48 PM	PHl3 MFC set to  0.000000
3/15/2011	2:26:48 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:26:48 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:26:48 PM	Tube furnace set to 0
3/15/2011	2:26:54 PM	Helium valve closed
3/15/2011	2:26:54 PM	H2 valve closed
3/15/2011	2:26:54 PM	BCl3 valve closed
3/15/2011	2:26:54 PM	PH3 valve closed
3/15/2011	2:26:54 PM	SiCl4 pre valve closed
3/15/2011	2:26:54 PM	SiCl4 post valve closed
3/15/2011	2:26:54 PM	Main Vac valve closed
3/15/2011	2:26:54 PM	Bypass valve closed
3/15/2011	2:26:54 PM	Bubbler valve closed
3/15/2011	2:26:54 PM	Helium MFC set to  0.000000
3/15/2011	2:26:54 PM	H2 MFC set to  0.000000
3/15/2011	2:26:54 PM	BCl3 MFC set to  0.000000
3/15/2011	2:26:54 PM	PHl3 MFC set to  0.000000
3/15/2011	2:26:54 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:26:54 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:26:54 PM	Tube furnace set to 0
3/15/2011	2:26:55 PM	Run finished at 2:26 PM
3/15/2011	2:26:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2011	2:30:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	2:30:25 PM	Recipe started at 2:30 PM
3/15/2011	2:30:25 PM	Helium valve closed
3/15/2011	2:30:25 PM	H2 valve closed
3/15/2011	2:30:25 PM	BCl3 valve closed
3/15/2011	2:30:25 PM	PH3 valve closed
3/15/2011	2:30:25 PM	SiCl4 pre valve closed
3/15/2011	2:30:25 PM	SiCl4 post valve closed
3/15/2011	2:30:25 PM	Main Vac valve closed
3/15/2011	2:30:25 PM	Bubbler valve closed
3/15/2011	2:30:25 PM	Bypass valve opened
3/15/2011	2:30:25 PM	Helium MFC set to  0.000000
3/15/2011	2:30:25 PM	H2 MFC set to  0.000000
3/15/2011	2:30:25 PM	BCl3 MFC set to  0.000000
3/15/2011	2:30:25 PM	PHl3 MFC set to  0.000000
3/15/2011	2:30:25 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:30:25 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:30:25 PM	Tube furnace set to 0
3/15/2011	2:30:57 PM	Helium valve closed
3/15/2011	2:30:57 PM	H2 valve closed
3/15/2011	2:30:57 PM	BCl3 valve closed
3/15/2011	2:30:57 PM	PH3 valve closed
3/15/2011	2:30:57 PM	SiCl4 pre valve closed
3/15/2011	2:30:57 PM	SiCl4 post valve closed
3/15/2011	2:30:57 PM	Bubbler valve closed
3/15/2011	2:30:57 PM	Main Vac valve opened
3/15/2011	2:30:57 PM	Bypass valve opened
3/15/2011	2:30:57 PM	Helium MFC set to  0.000000
3/15/2011	2:30:57 PM	H2 MFC set to  0.000000
3/15/2011	2:30:57 PM	BCl3 MFC set to  0.000000
3/15/2011	2:30:57 PM	PHl3 MFC set to  0.000000
3/15/2011	2:30:57 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:30:57 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:30:57 PM	Tube furnace set to 0
3/15/2011	2:30:57 PM	Run finished at 2:30 PM
3/15/2011	2:30:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	2:31:28 PM	Helium MFC set to  50.000000
3/15/2011	2:31:28 PM	Helium valve opened
3/15/2011	2:31:40 PM	Helium MFC set to  0.000000
3/15/2011	2:31:41 PM	Helium valve closed
3/15/2011	2:32:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/15/2011	2:32:32 PM	Recipe started at 2:32 PM
3/15/2011	2:32:32 PM	Helium valve closed
3/15/2011	2:32:32 PM	H2 valve closed
3/15/2011	2:32:32 PM	BCl3 valve closed
3/15/2011	2:32:32 PM	PH3 valve closed
3/15/2011	2:32:32 PM	SiCl4 pre valve closed
3/15/2011	2:32:32 PM	SiCl4 post valve closed
3/15/2011	2:32:32 PM	Main Vac valve closed
3/15/2011	2:32:32 PM	Bubbler valve closed
3/15/2011	2:32:32 PM	Bypass valve opened
3/15/2011	2:32:32 PM	Helium MFC set to  0.000000
3/15/2011	2:32:32 PM	H2 MFC set to  0.000000
3/15/2011	2:32:32 PM	BCl3 MFC set to  0.000000
3/15/2011	2:32:32 PM	PHl3 MFC set to  0.000000
3/15/2011	2:32:32 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:32:32 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:32:33 PM	Tube furnace set to 0
3/15/2011	2:32:33 PM	Helium valve closed
3/15/2011	2:32:33 PM	H2 valve closed
3/15/2011	2:32:33 PM	BCl3 valve closed
3/15/2011	2:32:33 PM	PH3 valve closed
3/15/2011	2:32:33 PM	SiCl4 pre valve closed
3/15/2011	2:32:33 PM	SiCl4 post valve closed
3/15/2011	2:32:33 PM	Bubbler valve closed
3/15/2011	2:32:33 PM	Main Vac valve opened
3/15/2011	2:32:33 PM	Bypass valve opened
3/15/2011	2:32:33 PM	Helium MFC set to  0.000000
3/15/2011	2:32:33 PM	H2 MFC set to  0.000000
3/15/2011	2:32:33 PM	BCl3 MFC set to  0.000000
3/15/2011	2:32:33 PM	PHl3 MFC set to  0.000000
3/15/2011	2:32:33 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:32:33 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:32:33 PM	Tube furnace set to 0
3/15/2011	2:33:33 PM	H2 valve closed
3/15/2011	2:33:33 PM	BCl3 valve closed
3/15/2011	2:33:33 PM	PH3 valve closed
3/15/2011	2:33:33 PM	SiCl4 pre valve closed
3/15/2011	2:33:33 PM	SiCl4 post valve closed
3/15/2011	2:33:33 PM	Bubbler valve closed
3/15/2011	2:33:33 PM	Helium valve opened
3/15/2011	2:33:33 PM	Main Vac valve opened
3/15/2011	2:33:33 PM	Bypass valve opened
3/15/2011	2:33:33 PM	Helium MFC set to  100.000000
3/15/2011	2:33:33 PM	H2 MFC set to  0.000000
3/15/2011	2:33:33 PM	BCl3 MFC set to  0.000000
3/15/2011	2:33:33 PM	PHl3 MFC set to  0.000000
3/15/2011	2:33:33 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:33:33 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:33:33 PM	Tube furnace set to 0
3/15/2011	2:34:33 PM	Helium valve closed
3/15/2011	2:34:33 PM	H2 valve closed
3/15/2011	2:34:33 PM	BCl3 valve closed
3/15/2011	2:34:33 PM	PH3 valve closed
3/15/2011	2:34:33 PM	SiCl4 pre valve closed
3/15/2011	2:34:33 PM	SiCl4 post valve closed
3/15/2011	2:34:33 PM	Bubbler valve closed
3/15/2011	2:34:33 PM	Main Vac valve opened
3/15/2011	2:34:33 PM	Bypass valve opened
3/15/2011	2:34:33 PM	Helium MFC set to  0.000000
3/15/2011	2:34:33 PM	H2 MFC set to  0.000000
3/15/2011	2:34:33 PM	BCl3 MFC set to  0.000000
3/15/2011	2:34:33 PM	PHl3 MFC set to  0.000000
3/15/2011	2:34:33 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:34:33 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:34:33 PM	Tube furnace set to 0
3/15/2011	2:35:33 PM	H2 valve closed
3/15/2011	2:35:33 PM	BCl3 valve closed
3/15/2011	2:35:33 PM	PH3 valve closed
3/15/2011	2:35:33 PM	SiCl4 pre valve closed
3/15/2011	2:35:33 PM	SiCl4 post valve closed
3/15/2011	2:35:33 PM	Bubbler valve closed
3/15/2011	2:35:33 PM	Helium valve opened
3/15/2011	2:35:33 PM	Main Vac valve opened
3/15/2011	2:35:33 PM	Bypass valve opened
3/15/2011	2:35:33 PM	Helium MFC set to  100.000000
3/15/2011	2:35:33 PM	H2 MFC set to  0.000000
3/15/2011	2:35:33 PM	BCl3 MFC set to  0.000000
3/15/2011	2:35:33 PM	PHl3 MFC set to  0.000000
3/15/2011	2:35:33 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:35:33 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:35:34 PM	Tube furnace set to 0
3/15/2011	2:36:34 PM	Helium valve closed
3/15/2011	2:36:34 PM	H2 valve closed
3/15/2011	2:36:34 PM	BCl3 valve closed
3/15/2011	2:36:34 PM	PH3 valve closed
3/15/2011	2:36:34 PM	SiCl4 pre valve closed
3/15/2011	2:36:34 PM	SiCl4 post valve closed
3/15/2011	2:36:34 PM	Bubbler valve closed
3/15/2011	2:36:34 PM	Main Vac valve opened
3/15/2011	2:36:34 PM	Bypass valve opened
3/15/2011	2:36:34 PM	Helium MFC set to  0.000000
3/15/2011	2:36:34 PM	H2 MFC set to  0.000000
3/15/2011	2:36:34 PM	BCl3 MFC set to  0.000000
3/15/2011	2:36:34 PM	PHl3 MFC set to  0.000000
3/15/2011	2:36:34 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:36:34 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:36:34 PM	Tube furnace set to 0
3/15/2011	2:37:34 PM	H2 valve closed
3/15/2011	2:37:34 PM	BCl3 valve closed
3/15/2011	2:37:34 PM	PH3 valve closed
3/15/2011	2:37:34 PM	SiCl4 pre valve closed
3/15/2011	2:37:34 PM	SiCl4 post valve closed
3/15/2011	2:37:34 PM	Bubbler valve closed
3/15/2011	2:37:34 PM	Helium valve opened
3/15/2011	2:37:34 PM	Main Vac valve opened
3/15/2011	2:37:34 PM	Bypass valve opened
3/15/2011	2:37:34 PM	Helium MFC set to  100.000000
3/15/2011	2:37:34 PM	H2 MFC set to  0.000000
3/15/2011	2:37:34 PM	BCl3 MFC set to  0.000000
3/15/2011	2:37:34 PM	PHl3 MFC set to  0.000000
3/15/2011	2:37:34 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:37:34 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:37:34 PM	Tube furnace set to 0
3/15/2011	2:38:34 PM	Helium valve closed
3/15/2011	2:38:34 PM	H2 valve closed
3/15/2011	2:38:34 PM	BCl3 valve closed
3/15/2011	2:38:34 PM	PH3 valve closed
3/15/2011	2:38:34 PM	SiCl4 pre valve closed
3/15/2011	2:38:34 PM	SiCl4 post valve closed
3/15/2011	2:38:34 PM	Bubbler valve closed
3/15/2011	2:38:34 PM	Main Vac valve opened
3/15/2011	2:38:34 PM	Bypass valve opened
3/15/2011	2:38:34 PM	Helium MFC set to  0.000000
3/15/2011	2:38:34 PM	H2 MFC set to  0.000000
3/15/2011	2:38:34 PM	BCl3 MFC set to  0.000000
3/15/2011	2:38:34 PM	PHl3 MFC set to  0.000000
3/15/2011	2:38:34 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:38:34 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:38:34 PM	Tube furnace set to 0
3/15/2011	2:39:34 PM	H2 valve closed
3/15/2011	2:39:34 PM	BCl3 valve closed
3/15/2011	2:39:34 PM	PH3 valve closed
3/15/2011	2:39:34 PM	SiCl4 pre valve closed
3/15/2011	2:39:34 PM	SiCl4 post valve closed
3/15/2011	2:39:34 PM	Bubbler valve closed
3/15/2011	2:39:34 PM	Helium valve opened
3/15/2011	2:39:34 PM	Main Vac valve opened
3/15/2011	2:39:34 PM	Bypass valve opened
3/15/2011	2:39:34 PM	Helium MFC set to  100.000000
3/15/2011	2:39:34 PM	H2 MFC set to  0.000000
3/15/2011	2:39:34 PM	BCl3 MFC set to  0.000000
3/15/2011	2:39:34 PM	PHl3 MFC set to  0.000000
3/15/2011	2:39:34 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:39:34 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:39:34 PM	Tube furnace set to 0
3/15/2011	2:40:34 PM	Helium valve closed
3/15/2011	2:40:34 PM	H2 valve closed
3/15/2011	2:40:34 PM	BCl3 valve closed
3/15/2011	2:40:34 PM	PH3 valve closed
3/15/2011	2:40:34 PM	SiCl4 pre valve closed
3/15/2011	2:40:34 PM	SiCl4 post valve closed
3/15/2011	2:40:34 PM	Bubbler valve closed
3/15/2011	2:40:34 PM	Main Vac valve opened
3/15/2011	2:40:34 PM	Bypass valve opened
3/15/2011	2:40:34 PM	Helium MFC set to  0.000000
3/15/2011	2:40:34 PM	H2 MFC set to  0.000000
3/15/2011	2:40:34 PM	BCl3 MFC set to  0.000000
3/15/2011	2:40:34 PM	PHl3 MFC set to  0.000000
3/15/2011	2:40:34 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:40:34 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:40:35 PM	Tube furnace set to 0
3/15/2011	2:41:35 PM	H2 valve closed
3/15/2011	2:41:35 PM	BCl3 valve closed
3/15/2011	2:41:35 PM	PH3 valve closed
3/15/2011	2:41:35 PM	SiCl4 pre valve closed
3/15/2011	2:41:35 PM	SiCl4 post valve closed
3/15/2011	2:41:35 PM	Bubbler valve closed
3/15/2011	2:41:35 PM	Helium valve opened
3/15/2011	2:41:35 PM	Main Vac valve opened
3/15/2011	2:41:35 PM	Bypass valve opened
3/15/2011	2:41:35 PM	Helium MFC set to  100.000000
3/15/2011	2:41:35 PM	H2 MFC set to  0.000000
3/15/2011	2:41:35 PM	BCl3 MFC set to  0.000000
3/15/2011	2:41:35 PM	PHl3 MFC set to  0.000000
3/15/2011	2:41:35 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:41:35 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:41:35 PM	Tube furnace set to 0
3/15/2011	2:42:35 PM	Helium valve closed
3/15/2011	2:42:35 PM	H2 valve closed
3/15/2011	2:42:35 PM	BCl3 valve closed
3/15/2011	2:42:35 PM	PH3 valve closed
3/15/2011	2:42:35 PM	SiCl4 pre valve closed
3/15/2011	2:42:35 PM	SiCl4 post valve closed
3/15/2011	2:42:35 PM	Bubbler valve closed
3/15/2011	2:42:35 PM	Main Vac valve opened
3/15/2011	2:42:35 PM	Bypass valve opened
3/15/2011	2:42:35 PM	Helium MFC set to  0.000000
3/15/2011	2:42:35 PM	H2 MFC set to  0.000000
3/15/2011	2:42:35 PM	BCl3 MFC set to  0.000000
3/15/2011	2:42:35 PM	PHl3 MFC set to  0.000000
3/15/2011	2:42:35 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:42:35 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:42:35 PM	Tube furnace set to 0
3/15/2011	2:43:35 PM	H2 valve closed
3/15/2011	2:43:35 PM	BCl3 valve closed
3/15/2011	2:43:35 PM	PH3 valve closed
3/15/2011	2:43:35 PM	SiCl4 pre valve closed
3/15/2011	2:43:35 PM	SiCl4 post valve closed
3/15/2011	2:43:35 PM	Bubbler valve closed
3/15/2011	2:43:35 PM	Helium valve opened
3/15/2011	2:43:35 PM	Main Vac valve opened
3/15/2011	2:43:35 PM	Bypass valve opened
3/15/2011	2:43:35 PM	Helium MFC set to  100.000000
3/15/2011	2:43:35 PM	H2 MFC set to  0.000000
3/15/2011	2:43:35 PM	BCl3 MFC set to  0.000000
3/15/2011	2:43:35 PM	PHl3 MFC set to  0.000000
3/15/2011	2:43:35 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:43:35 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:43:35 PM	Tube furnace set to 0
3/15/2011	2:44:35 PM	Helium valve closed
3/15/2011	2:44:35 PM	H2 valve closed
3/15/2011	2:44:35 PM	BCl3 valve closed
3/15/2011	2:44:35 PM	PH3 valve closed
3/15/2011	2:44:35 PM	SiCl4 pre valve closed
3/15/2011	2:44:35 PM	SiCl4 post valve closed
3/15/2011	2:44:35 PM	Bubbler valve closed
3/15/2011	2:44:35 PM	Main Vac valve opened
3/15/2011	2:44:35 PM	Bypass valve opened
3/15/2011	2:44:35 PM	Helium MFC set to  0.000000
3/15/2011	2:44:35 PM	H2 MFC set to  0.000000
3/15/2011	2:44:35 PM	BCl3 MFC set to  0.000000
3/15/2011	2:44:35 PM	PHl3 MFC set to  0.000000
3/15/2011	2:44:35 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:44:35 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:44:35 PM	Tube furnace set to 0
3/15/2011	2:45:35 PM	H2 valve closed
3/15/2011	2:45:35 PM	BCl3 valve closed
3/15/2011	2:45:35 PM	PH3 valve closed
3/15/2011	2:45:35 PM	SiCl4 pre valve closed
3/15/2011	2:45:35 PM	SiCl4 post valve closed
3/15/2011	2:45:35 PM	Bubbler valve closed
3/15/2011	2:45:35 PM	Helium valve opened
3/15/2011	2:45:35 PM	Main Vac valve opened
3/15/2011	2:45:35 PM	Bypass valve opened
3/15/2011	2:45:35 PM	Helium MFC set to  100.000000
3/15/2011	2:45:35 PM	H2 MFC set to  0.000000
3/15/2011	2:45:35 PM	BCl3 MFC set to  0.000000
3/15/2011	2:45:35 PM	PHl3 MFC set to  0.000000
3/15/2011	2:45:35 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:45:35 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:45:36 PM	Tube furnace set to 0
3/15/2011	2:46:36 PM	Helium valve closed
3/15/2011	2:46:36 PM	H2 valve closed
3/15/2011	2:46:36 PM	BCl3 valve closed
3/15/2011	2:46:36 PM	PH3 valve closed
3/15/2011	2:46:36 PM	SiCl4 pre valve closed
3/15/2011	2:46:36 PM	SiCl4 post valve closed
3/15/2011	2:46:36 PM	Bubbler valve closed
3/15/2011	2:46:36 PM	Main Vac valve opened
3/15/2011	2:46:36 PM	Bypass valve opened
3/15/2011	2:46:36 PM	Helium MFC set to  0.000000
3/15/2011	2:46:36 PM	H2 MFC set to  0.000000
3/15/2011	2:46:36 PM	BCl3 MFC set to  0.000000
3/15/2011	2:46:36 PM	PHl3 MFC set to  0.000000
3/15/2011	2:46:36 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:46:36 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:46:36 PM	Tube furnace set to 0
3/15/2011	2:47:36 PM	H2 valve closed
3/15/2011	2:47:36 PM	BCl3 valve closed
3/15/2011	2:47:36 PM	PH3 valve closed
3/15/2011	2:47:36 PM	SiCl4 pre valve closed
3/15/2011	2:47:36 PM	SiCl4 post valve closed
3/15/2011	2:47:36 PM	Bubbler valve closed
3/15/2011	2:47:36 PM	Helium valve opened
3/15/2011	2:47:36 PM	Main Vac valve opened
3/15/2011	2:47:36 PM	Bypass valve opened
3/15/2011	2:47:36 PM	Helium MFC set to  100.000000
3/15/2011	2:47:36 PM	H2 MFC set to  0.000000
3/15/2011	2:47:36 PM	BCl3 MFC set to  0.000000
3/15/2011	2:47:36 PM	PHl3 MFC set to  0.000000
3/15/2011	2:47:36 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:47:36 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:47:36 PM	Tube furnace set to 0
3/15/2011	2:48:36 PM	Helium valve closed
3/15/2011	2:48:36 PM	H2 valve closed
3/15/2011	2:48:36 PM	BCl3 valve closed
3/15/2011	2:48:36 PM	PH3 valve closed
3/15/2011	2:48:36 PM	SiCl4 pre valve closed
3/15/2011	2:48:36 PM	SiCl4 post valve closed
3/15/2011	2:48:36 PM	Bubbler valve closed
3/15/2011	2:48:36 PM	Main Vac valve opened
3/15/2011	2:48:36 PM	Bypass valve opened
3/15/2011	2:48:36 PM	Helium MFC set to  0.000000
3/15/2011	2:48:36 PM	H2 MFC set to  0.000000
3/15/2011	2:48:36 PM	BCl3 MFC set to  0.000000
3/15/2011	2:48:36 PM	PHl3 MFC set to  0.000000
3/15/2011	2:48:36 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:48:36 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:48:36 PM	Tube furnace set to 0
3/15/2011	2:49:36 PM	H2 valve closed
3/15/2011	2:49:36 PM	BCl3 valve closed
3/15/2011	2:49:36 PM	PH3 valve closed
3/15/2011	2:49:36 PM	SiCl4 pre valve closed
3/15/2011	2:49:36 PM	SiCl4 post valve closed
3/15/2011	2:49:36 PM	Bubbler valve closed
3/15/2011	2:49:36 PM	Helium valve opened
3/15/2011	2:49:36 PM	Main Vac valve opened
3/15/2011	2:49:36 PM	Bypass valve opened
3/15/2011	2:49:36 PM	Helium MFC set to  100.000000
3/15/2011	2:49:36 PM	H2 MFC set to  0.000000
3/15/2011	2:49:36 PM	BCl3 MFC set to  0.000000
3/15/2011	2:49:36 PM	PHl3 MFC set to  0.000000
3/15/2011	2:49:36 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:49:36 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:49:36 PM	Tube furnace set to 0
3/15/2011	2:50:36 PM	Helium valve closed
3/15/2011	2:50:36 PM	H2 valve closed
3/15/2011	2:50:36 PM	BCl3 valve closed
3/15/2011	2:50:36 PM	PH3 valve closed
3/15/2011	2:50:36 PM	SiCl4 pre valve closed
3/15/2011	2:50:36 PM	SiCl4 post valve closed
3/15/2011	2:50:36 PM	Bubbler valve closed
3/15/2011	2:50:36 PM	Main Vac valve opened
3/15/2011	2:50:36 PM	Bypass valve opened
3/15/2011	2:50:36 PM	Helium MFC set to  0.000000
3/15/2011	2:50:36 PM	H2 MFC set to  0.000000
3/15/2011	2:50:36 PM	BCl3 MFC set to  0.000000
3/15/2011	2:50:36 PM	PHl3 MFC set to  0.000000
3/15/2011	2:50:36 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:50:36 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:50:37 PM	Tube furnace set to 0
3/15/2011	2:51:37 PM	H2 valve closed
3/15/2011	2:51:37 PM	BCl3 valve closed
3/15/2011	2:51:37 PM	PH3 valve closed
3/15/2011	2:51:37 PM	SiCl4 pre valve closed
3/15/2011	2:51:37 PM	SiCl4 post valve closed
3/15/2011	2:51:37 PM	Bubbler valve closed
3/15/2011	2:51:37 PM	Helium valve opened
3/15/2011	2:51:37 PM	Main Vac valve opened
3/15/2011	2:51:37 PM	Bypass valve opened
3/15/2011	2:51:37 PM	Helium MFC set to  100.000000
3/15/2011	2:51:37 PM	H2 MFC set to  0.000000
3/15/2011	2:51:37 PM	BCl3 MFC set to  0.000000
3/15/2011	2:51:37 PM	PHl3 MFC set to  0.000000
3/15/2011	2:51:37 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:51:37 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:51:37 PM	Tube furnace set to 0
3/15/2011	2:52:37 PM	Helium valve closed
3/15/2011	2:52:37 PM	H2 valve closed
3/15/2011	2:52:37 PM	BCl3 valve closed
3/15/2011	2:52:37 PM	PH3 valve closed
3/15/2011	2:52:37 PM	SiCl4 pre valve closed
3/15/2011	2:52:37 PM	SiCl4 post valve closed
3/15/2011	2:52:37 PM	Bubbler valve closed
3/15/2011	2:52:37 PM	Main Vac valve opened
3/15/2011	2:52:37 PM	Bypass valve opened
3/15/2011	2:52:37 PM	Helium MFC set to  0.000000
3/15/2011	2:52:37 PM	H2 MFC set to  0.000000
3/15/2011	2:52:37 PM	BCl3 MFC set to  0.000000
3/15/2011	2:52:37 PM	PHl3 MFC set to  0.000000
3/15/2011	2:52:37 PM	SiCl4 MFC set to  0.000000
3/15/2011	2:52:37 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	2:52:37 PM	Tube furnace set to 0
3/15/2011	2:52:38 PM	Run finished at 2:52 PM
3/15/2011	2:52:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/15/2011	3:55:32 PM	Helium MFC set to  0.000000
3/15/2011	3:55:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/15/2011	3:55:34 PM	Recipe started at 3:55 PM
3/15/2011	3:55:34 PM	Helium valve closed
3/15/2011	3:55:34 PM	H2 valve closed
3/15/2011	3:55:34 PM	BCl3 valve closed
3/15/2011	3:55:34 PM	PH3 valve closed
3/15/2011	3:55:35 PM	SiCl4 pre valve closed
3/15/2011	3:55:35 PM	SiCl4 post valve closed
3/15/2011	3:55:35 PM	Main Vac valve closed
3/15/2011	3:55:35 PM	Bypass valve closed
3/15/2011	3:55:35 PM	Bubbler valve closed
3/15/2011	3:55:35 PM	Helium MFC set to  0.000000
3/15/2011	3:55:35 PM	H2 MFC set to  0.000000
3/15/2011	3:55:35 PM	BCl3 MFC set to  0.000000
3/15/2011	3:55:35 PM	PHl3 MFC set to  0.000000
3/15/2011	3:55:35 PM	SiCl4 MFC set to  0.000000
3/15/2011	3:55:35 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	3:55:35 PM	Tube furnace set to 0
3/15/2011	3:55:35 PM	Run finished at 3:55 PM
3/15/2011	3:55:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/15/2011	3:55:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	3:55:48 PM	Recipe started at 3:55 PM
3/15/2011	3:55:48 PM	Helium valve closed
3/15/2011	3:55:48 PM	H2 valve closed
3/15/2011	3:55:48 PM	BCl3 valve closed
3/15/2011	3:55:48 PM	PH3 valve closed
3/15/2011	3:55:48 PM	SiCl4 pre valve closed
3/15/2011	3:55:48 PM	SiCl4 post valve closed
3/15/2011	3:55:48 PM	Main Vac valve closed
3/15/2011	3:55:48 PM	Bubbler valve closed
3/15/2011	3:55:48 PM	Bypass valve opened
3/15/2011	3:55:48 PM	Helium MFC set to  0.000000
3/15/2011	3:55:48 PM	H2 MFC set to  0.000000
3/15/2011	3:55:48 PM	BCl3 MFC set to  0.000000
3/15/2011	3:55:48 PM	PHl3 MFC set to  0.000000
3/15/2011	3:55:48 PM	SiCl4 MFC set to  0.000000
3/15/2011	3:55:48 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	3:55:48 PM	Tube furnace set to 0
3/15/2011	3:55:48 PM	Helium valve closed
3/15/2011	3:55:48 PM	H2 valve closed
3/15/2011	3:55:48 PM	BCl3 valve closed
3/15/2011	3:55:48 PM	PH3 valve closed
3/15/2011	3:55:48 PM	SiCl4 pre valve closed
3/15/2011	3:55:48 PM	SiCl4 post valve closed
3/15/2011	3:55:48 PM	Bubbler valve closed
3/15/2011	3:55:48 PM	Main Vac valve opened
3/15/2011	3:55:48 PM	Bypass valve opened
3/15/2011	3:55:48 PM	Helium MFC set to  0.000000
3/15/2011	3:55:48 PM	H2 MFC set to  0.000000
3/15/2011	3:55:48 PM	BCl3 MFC set to  0.000000
3/15/2011	3:55:48 PM	PHl3 MFC set to  0.000000
3/15/2011	3:55:48 PM	SiCl4 MFC set to  0.000000
3/15/2011	3:55:48 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	3:55:49 PM	Tube furnace set to 0
3/15/2011	3:55:49 PM	Run finished at 3:55 PM
3/15/2011	3:55:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	3:55:54 PM	Helium MFC set to  50.000000
3/15/2011	3:55:55 PM	Helium valve opened
3/15/2011	3:56:18 PM	Helium MFC set to  100.000000
3/15/2011	3:56:51 PM	Helium MFC set to  0.000000
3/15/2011	3:56:51 PM	Helium valve closed
3/15/2011	3:56:51 PM	Helium valve opened
3/15/2011	3:56:52 PM	Helium valve closed
3/15/2011	3:57:36 PM	Recipe started at 3:57 PM
3/15/2011	3:57:36 PM	Helium valve closed
3/15/2011	3:57:36 PM	BCl3 valve closed
3/15/2011	3:57:36 PM	PH3 valve closed
3/15/2011	3:57:36 PM	SiCl4 pre valve closed
3/15/2011	3:57:36 PM	SiCl4 post valve closed
3/15/2011	3:57:36 PM	Main Vac valve closed
3/15/2011	3:57:36 PM	Bypass valve closed
3/15/2011	3:57:36 PM	Bubbler valve closed
3/15/2011	3:57:36 PM	H2 valve opened
3/15/2011	3:57:36 PM	Helium MFC set to  0.000000
3/15/2011	3:57:36 PM	H2 MFC set to  500.000000
3/15/2011	3:57:36 PM	BCl3 MFC set to  0.000000
3/15/2011	3:57:36 PM	PHl3 MFC set to  0.000000
3/15/2011	3:57:36 PM	SiCl4 MFC set to  0.000000
3/15/2011	3:57:36 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	3:57:36 PM	Tube furnace set to 0
3/15/2011	3:58:55 PM	Helium valve closed
3/15/2011	3:58:55 PM	BCl3 valve closed
3/15/2011	3:58:55 PM	PH3 valve closed
3/15/2011	3:58:55 PM	SiCl4 pre valve closed
3/15/2011	3:58:55 PM	SiCl4 post valve closed
3/15/2011	3:58:55 PM	Main Vac valve closed
3/15/2011	3:58:55 PM	Bypass valve closed
3/15/2011	3:58:55 PM	H2 valve opened
3/15/2011	3:58:55 PM	Bubbler valve opened
3/15/2011	3:58:55 PM	Helium MFC set to  0.000000
3/15/2011	3:58:55 PM	H2 MFC set to  500.000000
3/15/2011	3:58:55 PM	BCl3 MFC set to  0.000000
3/15/2011	3:58:55 PM	PHl3 MFC set to  0.000000
3/15/2011	3:58:55 PM	SiCl4 MFC set to  0.000000
3/15/2011	3:58:55 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	3:58:55 PM	Tube furnace set to 1000
3/15/2011	4:18:55 PM	Helium valve closed
3/15/2011	4:18:55 PM	PH3 valve closed
3/15/2011	4:18:55 PM	Main Vac valve closed
3/15/2011	4:18:55 PM	Bypass valve closed
3/15/2011	4:18:55 PM	H2 valve opened
3/15/2011	4:18:55 PM	BCl3 valve opened
3/15/2011	4:18:55 PM	SiCl4 pre valve opened
3/15/2011	4:18:55 PM	SiCl4 post valve opened
3/15/2011	4:18:55 PM	Bubbler valve opened
3/15/2011	4:18:55 PM	Helium MFC set to  0.000000
3/15/2011	4:18:55 PM	H2 MFC set to  500.000000
3/15/2011	4:18:55 PM	BCl3 MFC set to  2.500000
3/15/2011	4:18:55 PM	PHl3 MFC set to  0.000000
3/15/2011	4:18:55 PM	SiCl4 MFC set to  50.000000
3/15/2011	4:18:55 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	4:18:55 PM	Tube furnace set to 1000
3/15/2011	4:38:55 PM	H2 valve closed
3/15/2011	4:38:55 PM	BCl3 valve closed
3/15/2011	4:38:55 PM	PH3 valve closed
3/15/2011	4:38:55 PM	SiCl4 pre valve closed
3/15/2011	4:38:55 PM	SiCl4 post valve closed
3/15/2011	4:38:55 PM	Main Vac valve closed
3/15/2011	4:38:55 PM	Bypass valve closed
3/15/2011	4:38:55 PM	Helium valve opened
3/15/2011	4:38:55 PM	Bubbler valve opened
3/15/2011	4:38:55 PM	Helium MFC set to  500.000000
3/15/2011	4:38:55 PM	H2 MFC set to  0.000000
3/15/2011	4:38:55 PM	BCl3 MFC set to  0.000000
3/15/2011	4:38:55 PM	PHl3 MFC set to  0.000000
3/15/2011	4:38:55 PM	SiCl4 MFC set to  0.000000
3/15/2011	4:38:55 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	4:38:56 PM	Tube furnace set to 0
3/15/2011	4:58:56 PM	Helium valve closed
3/15/2011	4:58:56 PM	H2 valve closed
3/15/2011	4:58:56 PM	BCl3 valve closed
3/15/2011	4:58:56 PM	PH3 valve closed
3/15/2011	4:58:56 PM	SiCl4 pre valve closed
3/15/2011	4:58:56 PM	SiCl4 post valve closed
3/15/2011	4:58:56 PM	Main Vac valve closed
3/15/2011	4:58:56 PM	Bypass valve closed
3/15/2011	4:58:56 PM	Bubbler valve closed
3/15/2011	4:58:56 PM	Helium MFC set to  0.000000
3/15/2011	4:58:56 PM	H2 MFC set to  0.000000
3/15/2011	4:58:56 PM	BCl3 MFC set to  0.000000
3/15/2011	4:58:56 PM	PHl3 MFC set to  0.000000
3/15/2011	4:58:56 PM	SiCl4 MFC set to  0.000000
3/15/2011	4:58:56 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	4:58:56 PM	Tube furnace set to 0
3/15/2011	4:58:56 PM	Run finished at 4:58 PM
3/15/2011	6:14:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2011	6:14:38 PM	Recipe started at 6:14 PM
3/15/2011	6:14:38 PM	H2 valve closed
3/15/2011	6:14:38 PM	BCl3 valve closed
3/15/2011	6:14:38 PM	PH3 valve closed
3/15/2011	6:14:38 PM	SiCl4 pre valve closed
3/15/2011	6:14:38 PM	SiCl4 post valve closed
3/15/2011	6:14:38 PM	Main Vac valve closed
3/15/2011	6:14:38 PM	Bypass valve closed
3/15/2011	6:14:38 PM	Bubbler valve closed
3/15/2011	6:14:38 PM	Helium valve opened
3/15/2011	6:14:38 PM	Helium MFC set to  500.000000
3/15/2011	6:14:38 PM	H2 MFC set to  0.000000
3/15/2011	6:14:38 PM	BCl3 MFC set to  0.000000
3/15/2011	6:14:38 PM	PHl3 MFC set to  0.000000
3/15/2011	6:14:38 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:14:38 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:14:38 PM	Tube furnace set to 0
3/15/2011	6:14:44 PM	Helium valve closed
3/15/2011	6:14:44 PM	H2 valve closed
3/15/2011	6:14:44 PM	BCl3 valve closed
3/15/2011	6:14:44 PM	PH3 valve closed
3/15/2011	6:14:44 PM	SiCl4 pre valve closed
3/15/2011	6:14:44 PM	SiCl4 post valve closed
3/15/2011	6:14:44 PM	Main Vac valve closed
3/15/2011	6:14:44 PM	Bypass valve closed
3/15/2011	6:14:44 PM	Bubbler valve closed
3/15/2011	6:14:44 PM	Helium MFC set to  0.000000
3/15/2011	6:14:44 PM	H2 MFC set to  0.000000
3/15/2011	6:14:44 PM	BCl3 MFC set to  0.000000
3/15/2011	6:14:44 PM	PHl3 MFC set to  0.000000
3/15/2011	6:14:44 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:14:44 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:14:44 PM	Tube furnace set to 0
3/15/2011	6:14:44 PM	Run finished at 6:14 PM
3/15/2011	6:14:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2011	6:21:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	6:21:04 PM	Recipe started at 6:21 PM
3/15/2011	6:21:04 PM	Helium valve closed
3/15/2011	6:21:04 PM	H2 valve closed
3/15/2011	6:21:04 PM	BCl3 valve closed
3/15/2011	6:21:04 PM	PH3 valve closed
3/15/2011	6:21:04 PM	SiCl4 pre valve closed
3/15/2011	6:21:04 PM	SiCl4 post valve closed
3/15/2011	6:21:04 PM	Main Vac valve closed
3/15/2011	6:21:04 PM	Bubbler valve closed
3/15/2011	6:21:04 PM	Bypass valve opened
3/15/2011	6:21:04 PM	Helium MFC set to  0.000000
3/15/2011	6:21:04 PM	H2 MFC set to  0.000000
3/15/2011	6:21:04 PM	BCl3 MFC set to  0.000000
3/15/2011	6:21:04 PM	PHl3 MFC set to  0.000000
3/15/2011	6:21:04 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:21:04 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:21:05 PM	Tube furnace set to 0
3/15/2011	6:21:37 PM	Helium valve closed
3/15/2011	6:21:37 PM	H2 valve closed
3/15/2011	6:21:37 PM	BCl3 valve closed
3/15/2011	6:21:37 PM	PH3 valve closed
3/15/2011	6:21:37 PM	SiCl4 pre valve closed
3/15/2011	6:21:37 PM	SiCl4 post valve closed
3/15/2011	6:21:37 PM	Bubbler valve closed
3/15/2011	6:21:37 PM	Main Vac valve opened
3/15/2011	6:21:37 PM	Bypass valve opened
3/15/2011	6:21:37 PM	Helium MFC set to  0.000000
3/15/2011	6:21:37 PM	H2 MFC set to  0.000000
3/15/2011	6:21:37 PM	BCl3 MFC set to  0.000000
3/15/2011	6:21:37 PM	PHl3 MFC set to  0.000000
3/15/2011	6:21:37 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:21:37 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:21:37 PM	Tube furnace set to 0
3/15/2011	6:21:37 PM	Run finished at 6:21 PM
3/15/2011	6:21:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	6:23:05 PM	Helium MFC set to  20.000000
3/15/2011	6:23:05 PM	Helium valve opened
3/15/2011	6:23:45 PM	Helium MFC set to  0.000000
3/15/2011	6:23:45 PM	Helium valve closed
3/15/2011	6:24:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/15/2011	6:25:01 PM	Recipe started at 6:24 PM
3/15/2011	6:25:01 PM	Helium valve closed
3/15/2011	6:25:01 PM	H2 valve closed
3/15/2011	6:25:01 PM	BCl3 valve closed
3/15/2011	6:25:01 PM	PH3 valve closed
3/15/2011	6:25:01 PM	SiCl4 pre valve closed
3/15/2011	6:25:01 PM	SiCl4 post valve closed
3/15/2011	6:25:01 PM	Main Vac valve closed
3/15/2011	6:25:01 PM	Bubbler valve closed
3/15/2011	6:25:01 PM	Bypass valve opened
3/15/2011	6:25:01 PM	Helium MFC set to  0.000000
3/15/2011	6:25:01 PM	H2 MFC set to  0.000000
3/15/2011	6:25:01 PM	BCl3 MFC set to  0.000000
3/15/2011	6:25:01 PM	PHl3 MFC set to  0.000000
3/15/2011	6:25:01 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:25:01 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:25:01 PM	Tube furnace set to 0
3/15/2011	6:25:02 PM	Helium valve closed
3/15/2011	6:25:02 PM	H2 valve closed
3/15/2011	6:25:02 PM	BCl3 valve closed
3/15/2011	6:25:02 PM	PH3 valve closed
3/15/2011	6:25:02 PM	SiCl4 pre valve closed
3/15/2011	6:25:02 PM	SiCl4 post valve closed
3/15/2011	6:25:02 PM	Bubbler valve closed
3/15/2011	6:25:02 PM	Main Vac valve opened
3/15/2011	6:25:02 PM	Bypass valve opened
3/15/2011	6:25:02 PM	Helium MFC set to  0.000000
3/15/2011	6:25:02 PM	H2 MFC set to  0.000000
3/15/2011	6:25:02 PM	BCl3 MFC set to  0.000000
3/15/2011	6:25:02 PM	PHl3 MFC set to  0.000000
3/15/2011	6:25:02 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:25:02 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:25:02 PM	Tube furnace set to 0
3/15/2011	6:26:02 PM	H2 valve closed
3/15/2011	6:26:02 PM	BCl3 valve closed
3/15/2011	6:26:02 PM	PH3 valve closed
3/15/2011	6:26:02 PM	SiCl4 pre valve closed
3/15/2011	6:26:02 PM	SiCl4 post valve closed
3/15/2011	6:26:02 PM	Bubbler valve closed
3/15/2011	6:26:02 PM	Helium valve opened
3/15/2011	6:26:02 PM	Main Vac valve opened
3/15/2011	6:26:02 PM	Bypass valve opened
3/15/2011	6:26:02 PM	Helium MFC set to  100.000000
3/15/2011	6:26:02 PM	H2 MFC set to  0.000000
3/15/2011	6:26:02 PM	BCl3 MFC set to  0.000000
3/15/2011	6:26:02 PM	PHl3 MFC set to  0.000000
3/15/2011	6:26:02 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:26:02 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:26:02 PM	Tube furnace set to 0
3/15/2011	6:27:02 PM	Helium valve closed
3/15/2011	6:27:02 PM	H2 valve closed
3/15/2011	6:27:02 PM	BCl3 valve closed
3/15/2011	6:27:02 PM	PH3 valve closed
3/15/2011	6:27:02 PM	SiCl4 pre valve closed
3/15/2011	6:27:02 PM	SiCl4 post valve closed
3/15/2011	6:27:02 PM	Bubbler valve closed
3/15/2011	6:27:02 PM	Main Vac valve opened
3/15/2011	6:27:02 PM	Bypass valve opened
3/15/2011	6:27:02 PM	Helium MFC set to  0.000000
3/15/2011	6:27:02 PM	H2 MFC set to  0.000000
3/15/2011	6:27:02 PM	BCl3 MFC set to  0.000000
3/15/2011	6:27:02 PM	PHl3 MFC set to  0.000000
3/15/2011	6:27:02 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:27:02 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:27:02 PM	Tube furnace set to 0
3/15/2011	6:28:02 PM	H2 valve closed
3/15/2011	6:28:02 PM	BCl3 valve closed
3/15/2011	6:28:02 PM	PH3 valve closed
3/15/2011	6:28:02 PM	SiCl4 pre valve closed
3/15/2011	6:28:02 PM	SiCl4 post valve closed
3/15/2011	6:28:02 PM	Bubbler valve closed
3/15/2011	6:28:02 PM	Helium valve opened
3/15/2011	6:28:02 PM	Main Vac valve opened
3/15/2011	6:28:02 PM	Bypass valve opened
3/15/2011	6:28:02 PM	Helium MFC set to  100.000000
3/15/2011	6:28:02 PM	H2 MFC set to  0.000000
3/15/2011	6:28:02 PM	BCl3 MFC set to  0.000000
3/15/2011	6:28:02 PM	PHl3 MFC set to  0.000000
3/15/2011	6:28:02 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:28:02 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:28:02 PM	Tube furnace set to 0
3/15/2011	6:29:02 PM	Helium valve closed
3/15/2011	6:29:02 PM	H2 valve closed
3/15/2011	6:29:02 PM	BCl3 valve closed
3/15/2011	6:29:02 PM	PH3 valve closed
3/15/2011	6:29:02 PM	SiCl4 pre valve closed
3/15/2011	6:29:02 PM	SiCl4 post valve closed
3/15/2011	6:29:02 PM	Bubbler valve closed
3/15/2011	6:29:02 PM	Main Vac valve opened
3/15/2011	6:29:02 PM	Bypass valve opened
3/15/2011	6:29:02 PM	Helium MFC set to  0.000000
3/15/2011	6:29:02 PM	H2 MFC set to  0.000000
3/15/2011	6:29:02 PM	BCl3 MFC set to  0.000000
3/15/2011	6:29:02 PM	PHl3 MFC set to  0.000000
3/15/2011	6:29:02 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:29:02 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:29:03 PM	Tube furnace set to 0
3/15/2011	6:30:03 PM	H2 valve closed
3/15/2011	6:30:03 PM	BCl3 valve closed
3/15/2011	6:30:03 PM	PH3 valve closed
3/15/2011	6:30:03 PM	SiCl4 pre valve closed
3/15/2011	6:30:03 PM	SiCl4 post valve closed
3/15/2011	6:30:03 PM	Bubbler valve closed
3/15/2011	6:30:03 PM	Helium valve opened
3/15/2011	6:30:03 PM	Main Vac valve opened
3/15/2011	6:30:03 PM	Bypass valve opened
3/15/2011	6:30:03 PM	Helium MFC set to  100.000000
3/15/2011	6:30:03 PM	H2 MFC set to  0.000000
3/15/2011	6:30:03 PM	BCl3 MFC set to  0.000000
3/15/2011	6:30:03 PM	PHl3 MFC set to  0.000000
3/15/2011	6:30:03 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:30:03 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:30:03 PM	Tube furnace set to 0
3/15/2011	6:31:03 PM	Helium valve closed
3/15/2011	6:31:03 PM	H2 valve closed
3/15/2011	6:31:03 PM	BCl3 valve closed
3/15/2011	6:31:03 PM	PH3 valve closed
3/15/2011	6:31:03 PM	SiCl4 pre valve closed
3/15/2011	6:31:03 PM	SiCl4 post valve closed
3/15/2011	6:31:03 PM	Bubbler valve closed
3/15/2011	6:31:03 PM	Main Vac valve opened
3/15/2011	6:31:03 PM	Bypass valve opened
3/15/2011	6:31:03 PM	Helium MFC set to  0.000000
3/15/2011	6:31:03 PM	H2 MFC set to  0.000000
3/15/2011	6:31:03 PM	BCl3 MFC set to  0.000000
3/15/2011	6:31:03 PM	PHl3 MFC set to  0.000000
3/15/2011	6:31:03 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:31:03 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:31:03 PM	Tube furnace set to 0
3/15/2011	6:32:03 PM	H2 valve closed
3/15/2011	6:32:03 PM	BCl3 valve closed
3/15/2011	6:32:03 PM	PH3 valve closed
3/15/2011	6:32:03 PM	SiCl4 pre valve closed
3/15/2011	6:32:03 PM	SiCl4 post valve closed
3/15/2011	6:32:03 PM	Bubbler valve closed
3/15/2011	6:32:03 PM	Helium valve opened
3/15/2011	6:32:03 PM	Main Vac valve opened
3/15/2011	6:32:03 PM	Bypass valve opened
3/15/2011	6:32:03 PM	Helium MFC set to  100.000000
3/15/2011	6:32:03 PM	H2 MFC set to  0.000000
3/15/2011	6:32:03 PM	BCl3 MFC set to  0.000000
3/15/2011	6:32:03 PM	PHl3 MFC set to  0.000000
3/15/2011	6:32:03 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:32:03 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:32:03 PM	Tube furnace set to 0
3/15/2011	6:33:03 PM	Helium valve closed
3/15/2011	6:33:03 PM	H2 valve closed
3/15/2011	6:33:03 PM	BCl3 valve closed
3/15/2011	6:33:03 PM	PH3 valve closed
3/15/2011	6:33:03 PM	SiCl4 pre valve closed
3/15/2011	6:33:03 PM	SiCl4 post valve closed
3/15/2011	6:33:03 PM	Bubbler valve closed
3/15/2011	6:33:03 PM	Main Vac valve opened
3/15/2011	6:33:03 PM	Bypass valve opened
3/15/2011	6:33:03 PM	Helium MFC set to  0.000000
3/15/2011	6:33:03 PM	H2 MFC set to  0.000000
3/15/2011	6:33:03 PM	BCl3 MFC set to  0.000000
3/15/2011	6:33:03 PM	PHl3 MFC set to  0.000000
3/15/2011	6:33:03 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:33:03 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:33:03 PM	Tube furnace set to 0
3/15/2011	6:34:03 PM	H2 valve closed
3/15/2011	6:34:03 PM	BCl3 valve closed
3/15/2011	6:34:03 PM	PH3 valve closed
3/15/2011	6:34:03 PM	SiCl4 pre valve closed
3/15/2011	6:34:03 PM	SiCl4 post valve closed
3/15/2011	6:34:03 PM	Bubbler valve closed
3/15/2011	6:34:03 PM	Helium valve opened
3/15/2011	6:34:03 PM	Main Vac valve opened
3/15/2011	6:34:03 PM	Bypass valve opened
3/15/2011	6:34:03 PM	Helium MFC set to  100.000000
3/15/2011	6:34:03 PM	H2 MFC set to  0.000000
3/15/2011	6:34:03 PM	BCl3 MFC set to  0.000000
3/15/2011	6:34:03 PM	PHl3 MFC set to  0.000000
3/15/2011	6:34:03 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:34:03 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:34:04 PM	Tube furnace set to 0
3/15/2011	6:35:04 PM	Helium valve closed
3/15/2011	6:35:04 PM	H2 valve closed
3/15/2011	6:35:04 PM	BCl3 valve closed
3/15/2011	6:35:04 PM	PH3 valve closed
3/15/2011	6:35:04 PM	SiCl4 pre valve closed
3/15/2011	6:35:04 PM	SiCl4 post valve closed
3/15/2011	6:35:04 PM	Bubbler valve closed
3/15/2011	6:35:04 PM	Main Vac valve opened
3/15/2011	6:35:04 PM	Bypass valve opened
3/15/2011	6:35:04 PM	Helium MFC set to  0.000000
3/15/2011	6:35:04 PM	H2 MFC set to  0.000000
3/15/2011	6:35:04 PM	BCl3 MFC set to  0.000000
3/15/2011	6:35:04 PM	PHl3 MFC set to  0.000000
3/15/2011	6:35:04 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:35:04 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:35:04 PM	Tube furnace set to 0
3/15/2011	6:36:04 PM	H2 valve closed
3/15/2011	6:36:04 PM	BCl3 valve closed
3/15/2011	6:36:04 PM	PH3 valve closed
3/15/2011	6:36:04 PM	SiCl4 pre valve closed
3/15/2011	6:36:04 PM	SiCl4 post valve closed
3/15/2011	6:36:04 PM	Bubbler valve closed
3/15/2011	6:36:04 PM	Helium valve opened
3/15/2011	6:36:04 PM	Main Vac valve opened
3/15/2011	6:36:04 PM	Bypass valve opened
3/15/2011	6:36:04 PM	Helium MFC set to  100.000000
3/15/2011	6:36:04 PM	H2 MFC set to  0.000000
3/15/2011	6:36:04 PM	BCl3 MFC set to  0.000000
3/15/2011	6:36:04 PM	PHl3 MFC set to  0.000000
3/15/2011	6:36:04 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:36:04 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:36:04 PM	Tube furnace set to 0
3/15/2011	6:37:04 PM	Helium valve closed
3/15/2011	6:37:04 PM	H2 valve closed
3/15/2011	6:37:04 PM	BCl3 valve closed
3/15/2011	6:37:04 PM	PH3 valve closed
3/15/2011	6:37:04 PM	SiCl4 pre valve closed
3/15/2011	6:37:04 PM	SiCl4 post valve closed
3/15/2011	6:37:04 PM	Bubbler valve closed
3/15/2011	6:37:04 PM	Main Vac valve opened
3/15/2011	6:37:04 PM	Bypass valve opened
3/15/2011	6:37:04 PM	Helium MFC set to  0.000000
3/15/2011	6:37:04 PM	H2 MFC set to  0.000000
3/15/2011	6:37:04 PM	BCl3 MFC set to  0.000000
3/15/2011	6:37:04 PM	PHl3 MFC set to  0.000000
3/15/2011	6:37:04 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:37:04 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:37:04 PM	Tube furnace set to 0
3/15/2011	6:38:04 PM	H2 valve closed
3/15/2011	6:38:04 PM	BCl3 valve closed
3/15/2011	6:38:04 PM	PH3 valve closed
3/15/2011	6:38:04 PM	SiCl4 pre valve closed
3/15/2011	6:38:04 PM	SiCl4 post valve closed
3/15/2011	6:38:04 PM	Bubbler valve closed
3/15/2011	6:38:04 PM	Helium valve opened
3/15/2011	6:38:04 PM	Main Vac valve opened
3/15/2011	6:38:04 PM	Bypass valve opened
3/15/2011	6:38:04 PM	Helium MFC set to  100.000000
3/15/2011	6:38:04 PM	H2 MFC set to  0.000000
3/15/2011	6:38:04 PM	BCl3 MFC set to  0.000000
3/15/2011	6:38:04 PM	PHl3 MFC set to  0.000000
3/15/2011	6:38:04 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:38:04 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:38:04 PM	Tube furnace set to 0
3/15/2011	6:39:04 PM	Helium valve closed
3/15/2011	6:39:04 PM	H2 valve closed
3/15/2011	6:39:04 PM	BCl3 valve closed
3/15/2011	6:39:04 PM	PH3 valve closed
3/15/2011	6:39:04 PM	SiCl4 pre valve closed
3/15/2011	6:39:04 PM	SiCl4 post valve closed
3/15/2011	6:39:04 PM	Bubbler valve closed
3/15/2011	6:39:04 PM	Main Vac valve opened
3/15/2011	6:39:04 PM	Bypass valve opened
3/15/2011	6:39:04 PM	Helium MFC set to  0.000000
3/15/2011	6:39:04 PM	H2 MFC set to  0.000000
3/15/2011	6:39:04 PM	BCl3 MFC set to  0.000000
3/15/2011	6:39:04 PM	PHl3 MFC set to  0.000000
3/15/2011	6:39:04 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:39:04 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:39:05 PM	Tube furnace set to 0
3/15/2011	6:40:05 PM	H2 valve closed
3/15/2011	6:40:05 PM	BCl3 valve closed
3/15/2011	6:40:05 PM	PH3 valve closed
3/15/2011	6:40:05 PM	SiCl4 pre valve closed
3/15/2011	6:40:05 PM	SiCl4 post valve closed
3/15/2011	6:40:05 PM	Bubbler valve closed
3/15/2011	6:40:05 PM	Helium valve opened
3/15/2011	6:40:05 PM	Main Vac valve opened
3/15/2011	6:40:05 PM	Bypass valve opened
3/15/2011	6:40:05 PM	Helium MFC set to  100.000000
3/15/2011	6:40:05 PM	H2 MFC set to  0.000000
3/15/2011	6:40:05 PM	BCl3 MFC set to  0.000000
3/15/2011	6:40:05 PM	PHl3 MFC set to  0.000000
3/15/2011	6:40:05 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:40:05 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:40:05 PM	Tube furnace set to 0
3/15/2011	6:41:05 PM	Helium valve closed
3/15/2011	6:41:05 PM	H2 valve closed
3/15/2011	6:41:05 PM	BCl3 valve closed
3/15/2011	6:41:05 PM	PH3 valve closed
3/15/2011	6:41:05 PM	SiCl4 pre valve closed
3/15/2011	6:41:05 PM	SiCl4 post valve closed
3/15/2011	6:41:05 PM	Bubbler valve closed
3/15/2011	6:41:05 PM	Main Vac valve opened
3/15/2011	6:41:05 PM	Bypass valve opened
3/15/2011	6:41:05 PM	Helium MFC set to  0.000000
3/15/2011	6:41:05 PM	H2 MFC set to  0.000000
3/15/2011	6:41:05 PM	BCl3 MFC set to  0.000000
3/15/2011	6:41:05 PM	PHl3 MFC set to  0.000000
3/15/2011	6:41:05 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:41:05 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:41:05 PM	Tube furnace set to 0
3/15/2011	6:42:05 PM	H2 valve closed
3/15/2011	6:42:05 PM	BCl3 valve closed
3/15/2011	6:42:05 PM	PH3 valve closed
3/15/2011	6:42:05 PM	SiCl4 pre valve closed
3/15/2011	6:42:05 PM	SiCl4 post valve closed
3/15/2011	6:42:05 PM	Bubbler valve closed
3/15/2011	6:42:05 PM	Helium valve opened
3/15/2011	6:42:05 PM	Main Vac valve opened
3/15/2011	6:42:05 PM	Bypass valve opened
3/15/2011	6:42:05 PM	Helium MFC set to  100.000000
3/15/2011	6:42:05 PM	H2 MFC set to  0.000000
3/15/2011	6:42:05 PM	BCl3 MFC set to  0.000000
3/15/2011	6:42:05 PM	PHl3 MFC set to  0.000000
3/15/2011	6:42:05 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:42:05 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:42:05 PM	Tube furnace set to 0
3/15/2011	6:43:05 PM	Helium valve closed
3/15/2011	6:43:05 PM	H2 valve closed
3/15/2011	6:43:05 PM	BCl3 valve closed
3/15/2011	6:43:05 PM	PH3 valve closed
3/15/2011	6:43:05 PM	SiCl4 pre valve closed
3/15/2011	6:43:05 PM	SiCl4 post valve closed
3/15/2011	6:43:05 PM	Bubbler valve closed
3/15/2011	6:43:05 PM	Main Vac valve opened
3/15/2011	6:43:05 PM	Bypass valve opened
3/15/2011	6:43:05 PM	Helium MFC set to  0.000000
3/15/2011	6:43:05 PM	H2 MFC set to  0.000000
3/15/2011	6:43:05 PM	BCl3 MFC set to  0.000000
3/15/2011	6:43:05 PM	PHl3 MFC set to  0.000000
3/15/2011	6:43:05 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:43:05 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:43:05 PM	Tube furnace set to 0
3/15/2011	6:44:05 PM	H2 valve closed
3/15/2011	6:44:05 PM	BCl3 valve closed
3/15/2011	6:44:05 PM	PH3 valve closed
3/15/2011	6:44:05 PM	SiCl4 pre valve closed
3/15/2011	6:44:05 PM	SiCl4 post valve closed
3/15/2011	6:44:05 PM	Bubbler valve closed
3/15/2011	6:44:05 PM	Helium valve opened
3/15/2011	6:44:05 PM	Main Vac valve opened
3/15/2011	6:44:05 PM	Bypass valve opened
3/15/2011	6:44:05 PM	Helium MFC set to  100.000000
3/15/2011	6:44:05 PM	H2 MFC set to  0.000000
3/15/2011	6:44:05 PM	BCl3 MFC set to  0.000000
3/15/2011	6:44:05 PM	PHl3 MFC set to  0.000000
3/15/2011	6:44:05 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:44:05 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:44:06 PM	Tube furnace set to 0
3/15/2011	6:45:06 PM	Helium valve closed
3/15/2011	6:45:06 PM	H2 valve closed
3/15/2011	6:45:06 PM	BCl3 valve closed
3/15/2011	6:45:06 PM	PH3 valve closed
3/15/2011	6:45:06 PM	SiCl4 pre valve closed
3/15/2011	6:45:06 PM	SiCl4 post valve closed
3/15/2011	6:45:06 PM	Bubbler valve closed
3/15/2011	6:45:06 PM	Main Vac valve opened
3/15/2011	6:45:06 PM	Bypass valve opened
3/15/2011	6:45:06 PM	Helium MFC set to  0.000000
3/15/2011	6:45:06 PM	H2 MFC set to  0.000000
3/15/2011	6:45:06 PM	BCl3 MFC set to  0.000000
3/15/2011	6:45:06 PM	PHl3 MFC set to  0.000000
3/15/2011	6:45:06 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:45:06 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:45:06 PM	Tube furnace set to 0
3/15/2011	6:45:07 PM	Run finished at 6:45 PM
3/15/2011	6:45:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/15/2011	6:52:51 PM	Helium MFC set to  100.000000
3/15/2011	6:52:52 PM	Helium valve opened
3/15/2011	6:54:04 PM	Helium MFC set to  0.000000
3/15/2011	6:54:05 PM	Helium valve closed
3/15/2011	6:54:51 PM	Recipe started at 6:54 PM
3/15/2011	6:54:51 PM	Helium valve closed
3/15/2011	6:54:51 PM	BCl3 valve closed
3/15/2011	6:54:51 PM	PH3 valve closed
3/15/2011	6:54:51 PM	SiCl4 pre valve closed
3/15/2011	6:54:51 PM	SiCl4 post valve closed
3/15/2011	6:54:51 PM	Main Vac valve closed
3/15/2011	6:54:51 PM	Bypass valve closed
3/15/2011	6:54:51 PM	Bubbler valve closed
3/15/2011	6:54:51 PM	H2 valve opened
3/15/2011	6:54:51 PM	Helium MFC set to  0.000000
3/15/2011	6:54:51 PM	H2 MFC set to  500.000000
3/15/2011	6:54:51 PM	BCl3 MFC set to  0.000000
3/15/2011	6:54:51 PM	PHl3 MFC set to  0.000000
3/15/2011	6:54:51 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:54:51 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:54:51 PM	Tube furnace set to 0
3/15/2011	6:56:11 PM	Helium valve closed
3/15/2011	6:56:11 PM	BCl3 valve closed
3/15/2011	6:56:11 PM	PH3 valve closed
3/15/2011	6:56:11 PM	SiCl4 pre valve closed
3/15/2011	6:56:11 PM	SiCl4 post valve closed
3/15/2011	6:56:11 PM	Main Vac valve closed
3/15/2011	6:56:11 PM	Bypass valve closed
3/15/2011	6:56:11 PM	H2 valve opened
3/15/2011	6:56:11 PM	Bubbler valve opened
3/15/2011	6:56:11 PM	Helium MFC set to  0.000000
3/15/2011	6:56:11 PM	H2 MFC set to  500.000000
3/15/2011	6:56:11 PM	BCl3 MFC set to  0.000000
3/15/2011	6:56:11 PM	PHl3 MFC set to  0.000000
3/15/2011	6:56:11 PM	SiCl4 MFC set to  0.000000
3/15/2011	6:56:11 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	6:56:11 PM	Tube furnace set to 1000
3/15/2011	7:16:11 PM	Helium valve closed
3/15/2011	7:16:11 PM	PH3 valve closed
3/15/2011	7:16:11 PM	Main Vac valve closed
3/15/2011	7:16:11 PM	Bypass valve closed
3/15/2011	7:16:11 PM	H2 valve opened
3/15/2011	7:16:11 PM	BCl3 valve opened
3/15/2011	7:16:11 PM	SiCl4 pre valve opened
3/15/2011	7:16:11 PM	SiCl4 post valve opened
3/15/2011	7:16:11 PM	Bubbler valve opened
3/15/2011	7:16:11 PM	Helium MFC set to  0.000000
3/15/2011	7:16:11 PM	H2 MFC set to  500.000000
3/15/2011	7:16:11 PM	BCl3 MFC set to  2.500000
3/15/2011	7:16:11 PM	PHl3 MFC set to  0.000000
3/15/2011	7:16:11 PM	SiCl4 MFC set to  60.000000
3/15/2011	7:16:11 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	7:16:11 PM	Tube furnace set to 1000
3/15/2011	7:36:11 PM	H2 valve closed
3/15/2011	7:36:11 PM	BCl3 valve closed
3/15/2011	7:36:11 PM	PH3 valve closed
3/15/2011	7:36:11 PM	SiCl4 pre valve closed
3/15/2011	7:36:11 PM	SiCl4 post valve closed
3/15/2011	7:36:11 PM	Main Vac valve closed
3/15/2011	7:36:11 PM	Bypass valve closed
3/15/2011	7:36:11 PM	Helium valve opened
3/15/2011	7:36:11 PM	Bubbler valve opened
3/15/2011	7:36:11 PM	Helium MFC set to  500.000000
3/15/2011	7:36:11 PM	H2 MFC set to  0.000000
3/15/2011	7:36:11 PM	BCl3 MFC set to  0.000000
3/15/2011	7:36:11 PM	PHl3 MFC set to  0.000000
3/15/2011	7:36:11 PM	SiCl4 MFC set to  0.000000
3/15/2011	7:36:11 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	7:36:11 PM	Tube furnace set to 0
3/15/2011	7:56:11 PM	Helium valve closed
3/15/2011	7:56:11 PM	H2 valve closed
3/15/2011	7:56:11 PM	BCl3 valve closed
3/15/2011	7:56:11 PM	PH3 valve closed
3/15/2011	7:56:11 PM	SiCl4 pre valve closed
3/15/2011	7:56:11 PM	SiCl4 post valve closed
3/15/2011	7:56:11 PM	Main Vac valve closed
3/15/2011	7:56:11 PM	Bypass valve closed
3/15/2011	7:56:11 PM	Bubbler valve closed
3/15/2011	7:56:11 PM	Helium MFC set to  0.000000
3/15/2011	7:56:11 PM	H2 MFC set to  0.000000
3/15/2011	7:56:11 PM	BCl3 MFC set to  0.000000
3/15/2011	7:56:11 PM	PHl3 MFC set to  0.000000
3/15/2011	7:56:11 PM	SiCl4 MFC set to  0.000000
3/15/2011	7:56:11 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	7:56:11 PM	Tube furnace set to 0
3/15/2011	7:56:12 PM	Run finished at 7:56 PM
3/15/2011	9:34:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2011	9:34:59 PM	Recipe started at 9:34 PM
3/15/2011	9:34:59 PM	H2 valve closed
3/15/2011	9:34:59 PM	BCl3 valve closed
3/15/2011	9:34:59 PM	PH3 valve closed
3/15/2011	9:34:59 PM	SiCl4 pre valve closed
3/15/2011	9:34:59 PM	SiCl4 post valve closed
3/15/2011	9:34:59 PM	Main Vac valve closed
3/15/2011	9:34:59 PM	Bypass valve closed
3/15/2011	9:34:59 PM	Bubbler valve closed
3/15/2011	9:34:59 PM	Helium valve opened
3/15/2011	9:34:59 PM	Helium MFC set to  500.000000
3/15/2011	9:34:59 PM	H2 MFC set to  0.000000
3/15/2011	9:34:59 PM	BCl3 MFC set to  0.000000
3/15/2011	9:34:59 PM	PHl3 MFC set to  0.000000
3/15/2011	9:34:59 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:34:59 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:34:59 PM	Tube furnace set to 0
3/15/2011	9:35:04 PM	Helium valve closed
3/15/2011	9:35:04 PM	H2 valve closed
3/15/2011	9:35:04 PM	BCl3 valve closed
3/15/2011	9:35:04 PM	PH3 valve closed
3/15/2011	9:35:04 PM	SiCl4 pre valve closed
3/15/2011	9:35:04 PM	SiCl4 post valve closed
3/15/2011	9:35:04 PM	Main Vac valve closed
3/15/2011	9:35:04 PM	Bypass valve closed
3/15/2011	9:35:04 PM	Bubbler valve closed
3/15/2011	9:35:04 PM	Helium MFC set to  0.000000
3/15/2011	9:35:04 PM	H2 MFC set to  0.000000
3/15/2011	9:35:04 PM	BCl3 MFC set to  0.000000
3/15/2011	9:35:04 PM	PHl3 MFC set to  0.000000
3/15/2011	9:35:04 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:35:04 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:35:04 PM	Tube furnace set to 0
3/15/2011	9:35:04 PM	Run finished at 9:35 PM
3/15/2011	9:35:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2011	9:38:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	9:38:49 PM	Recipe started at 9:38 PM
3/15/2011	9:38:49 PM	Helium valve closed
3/15/2011	9:38:49 PM	H2 valve closed
3/15/2011	9:38:49 PM	BCl3 valve closed
3/15/2011	9:38:49 PM	PH3 valve closed
3/15/2011	9:38:49 PM	SiCl4 pre valve closed
3/15/2011	9:38:49 PM	SiCl4 post valve closed
3/15/2011	9:38:49 PM	Main Vac valve closed
3/15/2011	9:38:49 PM	Bubbler valve closed
3/15/2011	9:38:49 PM	Bypass valve opened
3/15/2011	9:38:49 PM	Helium MFC set to  0.000000
3/15/2011	9:38:49 PM	H2 MFC set to  0.000000
3/15/2011	9:38:49 PM	BCl3 MFC set to  0.000000
3/15/2011	9:38:49 PM	PHl3 MFC set to  0.000000
3/15/2011	9:38:49 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:38:49 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:38:49 PM	Tube furnace set to 0
3/15/2011	9:39:20 PM	Helium valve closed
3/15/2011	9:39:20 PM	H2 valve closed
3/15/2011	9:39:20 PM	BCl3 valve closed
3/15/2011	9:39:20 PM	PH3 valve closed
3/15/2011	9:39:20 PM	SiCl4 pre valve closed
3/15/2011	9:39:20 PM	SiCl4 post valve closed
3/15/2011	9:39:20 PM	Bubbler valve closed
3/15/2011	9:39:20 PM	Main Vac valve opened
3/15/2011	9:39:20 PM	Bypass valve opened
3/15/2011	9:39:20 PM	Helium MFC set to  0.000000
3/15/2011	9:39:20 PM	H2 MFC set to  0.000000
3/15/2011	9:39:20 PM	BCl3 MFC set to  0.000000
3/15/2011	9:39:20 PM	PHl3 MFC set to  0.000000
3/15/2011	9:39:20 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:39:20 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:39:20 PM	Tube furnace set to 0
3/15/2011	9:39:21 PM	Run finished at 9:39 PM
3/15/2011	9:39:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	9:39:48 PM	Helium MFC set to  10.000000
3/15/2011	9:39:48 PM	Helium valve opened
3/15/2011	9:40:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/15/2011	9:40:53 PM	Recipe started at 9:40 PM
3/15/2011	9:40:53 PM	Helium valve closed
3/15/2011	9:40:53 PM	H2 valve closed
3/15/2011	9:40:53 PM	BCl3 valve closed
3/15/2011	9:40:53 PM	PH3 valve closed
3/15/2011	9:40:53 PM	SiCl4 pre valve closed
3/15/2011	9:40:53 PM	SiCl4 post valve closed
3/15/2011	9:40:53 PM	Main Vac valve closed
3/15/2011	9:40:53 PM	Bubbler valve closed
3/15/2011	9:40:53 PM	Bypass valve opened
3/15/2011	9:40:53 PM	Helium MFC set to  0.000000
3/15/2011	9:40:53 PM	H2 MFC set to  0.000000
3/15/2011	9:40:53 PM	BCl3 MFC set to  0.000000
3/15/2011	9:40:53 PM	PHl3 MFC set to  0.000000
3/15/2011	9:40:53 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:40:53 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:40:54 PM	Tube furnace set to 0
3/15/2011	9:40:54 PM	Helium valve closed
3/15/2011	9:40:54 PM	H2 valve closed
3/15/2011	9:40:54 PM	BCl3 valve closed
3/15/2011	9:40:54 PM	PH3 valve closed
3/15/2011	9:40:54 PM	SiCl4 pre valve closed
3/15/2011	9:40:54 PM	SiCl4 post valve closed
3/15/2011	9:40:54 PM	Bubbler valve closed
3/15/2011	9:40:54 PM	Main Vac valve opened
3/15/2011	9:40:54 PM	Bypass valve opened
3/15/2011	9:40:54 PM	Helium MFC set to  0.000000
3/15/2011	9:40:54 PM	H2 MFC set to  0.000000
3/15/2011	9:40:54 PM	BCl3 MFC set to  0.000000
3/15/2011	9:40:54 PM	PHl3 MFC set to  0.000000
3/15/2011	9:40:54 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:40:54 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:40:54 PM	Tube furnace set to 0
3/15/2011	9:41:54 PM	H2 valve closed
3/15/2011	9:41:54 PM	BCl3 valve closed
3/15/2011	9:41:54 PM	PH3 valve closed
3/15/2011	9:41:54 PM	SiCl4 pre valve closed
3/15/2011	9:41:54 PM	SiCl4 post valve closed
3/15/2011	9:41:54 PM	Bubbler valve closed
3/15/2011	9:41:54 PM	Helium valve opened
3/15/2011	9:41:54 PM	Main Vac valve opened
3/15/2011	9:41:54 PM	Bypass valve opened
3/15/2011	9:41:54 PM	Helium MFC set to  100.000000
3/15/2011	9:41:54 PM	H2 MFC set to  0.000000
3/15/2011	9:41:54 PM	BCl3 MFC set to  0.000000
3/15/2011	9:41:54 PM	PHl3 MFC set to  0.000000
3/15/2011	9:41:54 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:41:54 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:41:54 PM	Tube furnace set to 0
3/15/2011	9:42:54 PM	Helium valve closed
3/15/2011	9:42:54 PM	H2 valve closed
3/15/2011	9:42:54 PM	BCl3 valve closed
3/15/2011	9:42:54 PM	PH3 valve closed
3/15/2011	9:42:54 PM	SiCl4 pre valve closed
3/15/2011	9:42:54 PM	SiCl4 post valve closed
3/15/2011	9:42:54 PM	Bubbler valve closed
3/15/2011	9:42:54 PM	Main Vac valve opened
3/15/2011	9:42:54 PM	Bypass valve opened
3/15/2011	9:42:54 PM	Helium MFC set to  0.000000
3/15/2011	9:42:54 PM	H2 MFC set to  0.000000
3/15/2011	9:42:54 PM	BCl3 MFC set to  0.000000
3/15/2011	9:42:54 PM	PHl3 MFC set to  0.000000
3/15/2011	9:42:54 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:42:54 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:42:54 PM	Tube furnace set to 0
3/15/2011	9:43:54 PM	H2 valve closed
3/15/2011	9:43:54 PM	BCl3 valve closed
3/15/2011	9:43:54 PM	PH3 valve closed
3/15/2011	9:43:54 PM	SiCl4 pre valve closed
3/15/2011	9:43:54 PM	SiCl4 post valve closed
3/15/2011	9:43:54 PM	Bubbler valve closed
3/15/2011	9:43:54 PM	Helium valve opened
3/15/2011	9:43:54 PM	Main Vac valve opened
3/15/2011	9:43:54 PM	Bypass valve opened
3/15/2011	9:43:54 PM	Helium MFC set to  100.000000
3/15/2011	9:43:54 PM	H2 MFC set to  0.000000
3/15/2011	9:43:54 PM	BCl3 MFC set to  0.000000
3/15/2011	9:43:54 PM	PHl3 MFC set to  0.000000
3/15/2011	9:43:54 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:43:54 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:43:55 PM	Tube furnace set to 0
3/15/2011	9:44:55 PM	Helium valve closed
3/15/2011	9:44:55 PM	H2 valve closed
3/15/2011	9:44:55 PM	BCl3 valve closed
3/15/2011	9:44:55 PM	PH3 valve closed
3/15/2011	9:44:55 PM	SiCl4 pre valve closed
3/15/2011	9:44:55 PM	SiCl4 post valve closed
3/15/2011	9:44:55 PM	Bubbler valve closed
3/15/2011	9:44:55 PM	Main Vac valve opened
3/15/2011	9:44:55 PM	Bypass valve opened
3/15/2011	9:44:55 PM	Helium MFC set to  0.000000
3/15/2011	9:44:55 PM	H2 MFC set to  0.000000
3/15/2011	9:44:55 PM	BCl3 MFC set to  0.000000
3/15/2011	9:44:55 PM	PHl3 MFC set to  0.000000
3/15/2011	9:44:55 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:44:55 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:44:55 PM	Tube furnace set to 0
3/15/2011	9:45:55 PM	H2 valve closed
3/15/2011	9:45:55 PM	BCl3 valve closed
3/15/2011	9:45:55 PM	PH3 valve closed
3/15/2011	9:45:55 PM	SiCl4 pre valve closed
3/15/2011	9:45:55 PM	SiCl4 post valve closed
3/15/2011	9:45:55 PM	Bubbler valve closed
3/15/2011	9:45:55 PM	Helium valve opened
3/15/2011	9:45:55 PM	Main Vac valve opened
3/15/2011	9:45:55 PM	Bypass valve opened
3/15/2011	9:45:55 PM	Helium MFC set to  100.000000
3/15/2011	9:45:55 PM	H2 MFC set to  0.000000
3/15/2011	9:45:55 PM	BCl3 MFC set to  0.000000
3/15/2011	9:45:55 PM	PHl3 MFC set to  0.000000
3/15/2011	9:45:55 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:45:55 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:45:55 PM	Tube furnace set to 0
3/15/2011	9:46:55 PM	Helium valve closed
3/15/2011	9:46:55 PM	H2 valve closed
3/15/2011	9:46:55 PM	BCl3 valve closed
3/15/2011	9:46:55 PM	PH3 valve closed
3/15/2011	9:46:55 PM	SiCl4 pre valve closed
3/15/2011	9:46:55 PM	SiCl4 post valve closed
3/15/2011	9:46:55 PM	Bubbler valve closed
3/15/2011	9:46:55 PM	Main Vac valve opened
3/15/2011	9:46:55 PM	Bypass valve opened
3/15/2011	9:46:55 PM	Helium MFC set to  0.000000
3/15/2011	9:46:55 PM	H2 MFC set to  0.000000
3/15/2011	9:46:55 PM	BCl3 MFC set to  0.000000
3/15/2011	9:46:55 PM	PHl3 MFC set to  0.000000
3/15/2011	9:46:55 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:46:55 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:46:55 PM	Tube furnace set to 0
3/15/2011	9:47:55 PM	H2 valve closed
3/15/2011	9:47:55 PM	BCl3 valve closed
3/15/2011	9:47:55 PM	PH3 valve closed
3/15/2011	9:47:55 PM	SiCl4 pre valve closed
3/15/2011	9:47:55 PM	SiCl4 post valve closed
3/15/2011	9:47:55 PM	Bubbler valve closed
3/15/2011	9:47:55 PM	Helium valve opened
3/15/2011	9:47:55 PM	Main Vac valve opened
3/15/2011	9:47:55 PM	Bypass valve opened
3/15/2011	9:47:55 PM	Helium MFC set to  100.000000
3/15/2011	9:47:55 PM	H2 MFC set to  0.000000
3/15/2011	9:47:55 PM	BCl3 MFC set to  0.000000
3/15/2011	9:47:55 PM	PHl3 MFC set to  0.000000
3/15/2011	9:47:55 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:47:55 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:47:55 PM	Tube furnace set to 0
3/15/2011	9:48:55 PM	Helium valve closed
3/15/2011	9:48:55 PM	H2 valve closed
3/15/2011	9:48:55 PM	BCl3 valve closed
3/15/2011	9:48:55 PM	PH3 valve closed
3/15/2011	9:48:55 PM	SiCl4 pre valve closed
3/15/2011	9:48:55 PM	SiCl4 post valve closed
3/15/2011	9:48:55 PM	Bubbler valve closed
3/15/2011	9:48:55 PM	Main Vac valve opened
3/15/2011	9:48:55 PM	Bypass valve opened
3/15/2011	9:48:55 PM	Helium MFC set to  0.000000
3/15/2011	9:48:55 PM	H2 MFC set to  0.000000
3/15/2011	9:48:55 PM	BCl3 MFC set to  0.000000
3/15/2011	9:48:55 PM	PHl3 MFC set to  0.000000
3/15/2011	9:48:55 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:48:55 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:48:56 PM	Tube furnace set to 0
3/15/2011	9:49:56 PM	H2 valve closed
3/15/2011	9:49:56 PM	BCl3 valve closed
3/15/2011	9:49:56 PM	PH3 valve closed
3/15/2011	9:49:56 PM	SiCl4 pre valve closed
3/15/2011	9:49:56 PM	SiCl4 post valve closed
3/15/2011	9:49:56 PM	Bubbler valve closed
3/15/2011	9:49:56 PM	Helium valve opened
3/15/2011	9:49:56 PM	Main Vac valve opened
3/15/2011	9:49:56 PM	Bypass valve opened
3/15/2011	9:49:56 PM	Helium MFC set to  100.000000
3/15/2011	9:49:56 PM	H2 MFC set to  0.000000
3/15/2011	9:49:56 PM	BCl3 MFC set to  0.000000
3/15/2011	9:49:56 PM	PHl3 MFC set to  0.000000
3/15/2011	9:49:56 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:49:56 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:49:56 PM	Tube furnace set to 0
3/15/2011	9:50:56 PM	Helium valve closed
3/15/2011	9:50:56 PM	H2 valve closed
3/15/2011	9:50:56 PM	BCl3 valve closed
3/15/2011	9:50:56 PM	PH3 valve closed
3/15/2011	9:50:56 PM	SiCl4 pre valve closed
3/15/2011	9:50:56 PM	SiCl4 post valve closed
3/15/2011	9:50:56 PM	Bubbler valve closed
3/15/2011	9:50:56 PM	Main Vac valve opened
3/15/2011	9:50:56 PM	Bypass valve opened
3/15/2011	9:50:56 PM	Helium MFC set to  0.000000
3/15/2011	9:50:56 PM	H2 MFC set to  0.000000
3/15/2011	9:50:56 PM	BCl3 MFC set to  0.000000
3/15/2011	9:50:56 PM	PHl3 MFC set to  0.000000
3/15/2011	9:50:56 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:50:56 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:50:56 PM	Tube furnace set to 0
3/15/2011	9:51:56 PM	H2 valve closed
3/15/2011	9:51:56 PM	BCl3 valve closed
3/15/2011	9:51:56 PM	PH3 valve closed
3/15/2011	9:51:56 PM	SiCl4 pre valve closed
3/15/2011	9:51:56 PM	SiCl4 post valve closed
3/15/2011	9:51:56 PM	Bubbler valve closed
3/15/2011	9:51:56 PM	Helium valve opened
3/15/2011	9:51:56 PM	Main Vac valve opened
3/15/2011	9:51:56 PM	Bypass valve opened
3/15/2011	9:51:56 PM	Helium MFC set to  100.000000
3/15/2011	9:51:56 PM	H2 MFC set to  0.000000
3/15/2011	9:51:56 PM	BCl3 MFC set to  0.000000
3/15/2011	9:51:56 PM	PHl3 MFC set to  0.000000
3/15/2011	9:51:56 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:51:56 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:51:56 PM	Tube furnace set to 0
3/15/2011	9:52:56 PM	Helium valve closed
3/15/2011	9:52:56 PM	H2 valve closed
3/15/2011	9:52:56 PM	BCl3 valve closed
3/15/2011	9:52:56 PM	PH3 valve closed
3/15/2011	9:52:56 PM	SiCl4 pre valve closed
3/15/2011	9:52:56 PM	SiCl4 post valve closed
3/15/2011	9:52:56 PM	Bubbler valve closed
3/15/2011	9:52:56 PM	Main Vac valve opened
3/15/2011	9:52:56 PM	Bypass valve opened
3/15/2011	9:52:56 PM	Helium MFC set to  0.000000
3/15/2011	9:52:56 PM	H2 MFC set to  0.000000
3/15/2011	9:52:56 PM	BCl3 MFC set to  0.000000
3/15/2011	9:52:56 PM	PHl3 MFC set to  0.000000
3/15/2011	9:52:56 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:52:56 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:52:56 PM	Tube furnace set to 0
3/15/2011	9:53:56 PM	H2 valve closed
3/15/2011	9:53:56 PM	BCl3 valve closed
3/15/2011	9:53:56 PM	PH3 valve closed
3/15/2011	9:53:56 PM	SiCl4 pre valve closed
3/15/2011	9:53:56 PM	SiCl4 post valve closed
3/15/2011	9:53:56 PM	Bubbler valve closed
3/15/2011	9:53:56 PM	Helium valve opened
3/15/2011	9:53:56 PM	Main Vac valve opened
3/15/2011	9:53:56 PM	Bypass valve opened
3/15/2011	9:53:56 PM	Helium MFC set to  100.000000
3/15/2011	9:53:56 PM	H2 MFC set to  0.000000
3/15/2011	9:53:56 PM	BCl3 MFC set to  0.000000
3/15/2011	9:53:56 PM	PHl3 MFC set to  0.000000
3/15/2011	9:53:56 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:53:56 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:53:57 PM	Tube furnace set to 0
3/15/2011	9:54:57 PM	Helium valve closed
3/15/2011	9:54:57 PM	H2 valve closed
3/15/2011	9:54:57 PM	BCl3 valve closed
3/15/2011	9:54:57 PM	PH3 valve closed
3/15/2011	9:54:57 PM	SiCl4 pre valve closed
3/15/2011	9:54:57 PM	SiCl4 post valve closed
3/15/2011	9:54:57 PM	Bubbler valve closed
3/15/2011	9:54:57 PM	Main Vac valve opened
3/15/2011	9:54:57 PM	Bypass valve opened
3/15/2011	9:54:57 PM	Helium MFC set to  0.000000
3/15/2011	9:54:57 PM	H2 MFC set to  0.000000
3/15/2011	9:54:57 PM	BCl3 MFC set to  0.000000
3/15/2011	9:54:57 PM	PHl3 MFC set to  0.000000
3/15/2011	9:54:57 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:54:57 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:54:57 PM	Tube furnace set to 0
3/15/2011	9:55:57 PM	H2 valve closed
3/15/2011	9:55:57 PM	BCl3 valve closed
3/15/2011	9:55:57 PM	PH3 valve closed
3/15/2011	9:55:57 PM	SiCl4 pre valve closed
3/15/2011	9:55:57 PM	SiCl4 post valve closed
3/15/2011	9:55:57 PM	Bubbler valve closed
3/15/2011	9:55:57 PM	Helium valve opened
3/15/2011	9:55:57 PM	Main Vac valve opened
3/15/2011	9:55:57 PM	Bypass valve opened
3/15/2011	9:55:57 PM	Helium MFC set to  100.000000
3/15/2011	9:55:57 PM	H2 MFC set to  0.000000
3/15/2011	9:55:57 PM	BCl3 MFC set to  0.000000
3/15/2011	9:55:57 PM	PHl3 MFC set to  0.000000
3/15/2011	9:55:57 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:55:57 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:55:57 PM	Tube furnace set to 0
3/15/2011	9:56:57 PM	Helium valve closed
3/15/2011	9:56:57 PM	H2 valve closed
3/15/2011	9:56:57 PM	BCl3 valve closed
3/15/2011	9:56:57 PM	PH3 valve closed
3/15/2011	9:56:57 PM	SiCl4 pre valve closed
3/15/2011	9:56:57 PM	SiCl4 post valve closed
3/15/2011	9:56:57 PM	Bubbler valve closed
3/15/2011	9:56:57 PM	Main Vac valve opened
3/15/2011	9:56:57 PM	Bypass valve opened
3/15/2011	9:56:57 PM	Helium MFC set to  0.000000
3/15/2011	9:56:57 PM	H2 MFC set to  0.000000
3/15/2011	9:56:57 PM	BCl3 MFC set to  0.000000
3/15/2011	9:56:57 PM	PHl3 MFC set to  0.000000
3/15/2011	9:56:57 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:56:57 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:56:57 PM	Tube furnace set to 0
3/15/2011	9:57:57 PM	H2 valve closed
3/15/2011	9:57:57 PM	BCl3 valve closed
3/15/2011	9:57:57 PM	PH3 valve closed
3/15/2011	9:57:57 PM	SiCl4 pre valve closed
3/15/2011	9:57:57 PM	SiCl4 post valve closed
3/15/2011	9:57:57 PM	Bubbler valve closed
3/15/2011	9:57:57 PM	Helium valve opened
3/15/2011	9:57:57 PM	Main Vac valve opened
3/15/2011	9:57:57 PM	Bypass valve opened
3/15/2011	9:57:57 PM	Helium MFC set to  100.000000
3/15/2011	9:57:57 PM	H2 MFC set to  0.000000
3/15/2011	9:57:57 PM	BCl3 MFC set to  0.000000
3/15/2011	9:57:57 PM	PHl3 MFC set to  0.000000
3/15/2011	9:57:57 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:57:57 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:57:57 PM	Tube furnace set to 0
3/15/2011	9:58:57 PM	Helium valve closed
3/15/2011	9:58:57 PM	H2 valve closed
3/15/2011	9:58:57 PM	BCl3 valve closed
3/15/2011	9:58:57 PM	PH3 valve closed
3/15/2011	9:58:57 PM	SiCl4 pre valve closed
3/15/2011	9:58:57 PM	SiCl4 post valve closed
3/15/2011	9:58:57 PM	Bubbler valve closed
3/15/2011	9:58:57 PM	Main Vac valve opened
3/15/2011	9:58:57 PM	Bypass valve opened
3/15/2011	9:58:57 PM	Helium MFC set to  0.000000
3/15/2011	9:58:57 PM	H2 MFC set to  0.000000
3/15/2011	9:58:57 PM	BCl3 MFC set to  0.000000
3/15/2011	9:58:57 PM	PHl3 MFC set to  0.000000
3/15/2011	9:58:57 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:58:57 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:58:58 PM	Tube furnace set to 0
3/15/2011	9:59:58 PM	H2 valve closed
3/15/2011	9:59:58 PM	BCl3 valve closed
3/15/2011	9:59:58 PM	PH3 valve closed
3/15/2011	9:59:58 PM	SiCl4 pre valve closed
3/15/2011	9:59:58 PM	SiCl4 post valve closed
3/15/2011	9:59:58 PM	Bubbler valve closed
3/15/2011	9:59:58 PM	Helium valve opened
3/15/2011	9:59:58 PM	Main Vac valve opened
3/15/2011	9:59:58 PM	Bypass valve opened
3/15/2011	9:59:58 PM	Helium MFC set to  100.000000
3/15/2011	9:59:58 PM	H2 MFC set to  0.000000
3/15/2011	9:59:58 PM	BCl3 MFC set to  0.000000
3/15/2011	9:59:58 PM	PHl3 MFC set to  0.000000
3/15/2011	9:59:58 PM	SiCl4 MFC set to  0.000000
3/15/2011	9:59:58 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	9:59:58 PM	Tube furnace set to 0
3/15/2011	10:00:58 PM	Helium valve closed
3/15/2011	10:00:58 PM	H2 valve closed
3/15/2011	10:00:58 PM	BCl3 valve closed
3/15/2011	10:00:58 PM	PH3 valve closed
3/15/2011	10:00:58 PM	SiCl4 pre valve closed
3/15/2011	10:00:58 PM	SiCl4 post valve closed
3/15/2011	10:00:58 PM	Bubbler valve closed
3/15/2011	10:00:58 PM	Main Vac valve opened
3/15/2011	10:00:58 PM	Bypass valve opened
3/15/2011	10:00:58 PM	Helium MFC set to  0.000000
3/15/2011	10:00:58 PM	H2 MFC set to  0.000000
3/15/2011	10:00:58 PM	BCl3 MFC set to  0.000000
3/15/2011	10:00:58 PM	PHl3 MFC set to  0.000000
3/15/2011	10:00:58 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:00:58 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:00:58 PM	Tube furnace set to 0
3/15/2011	10:00:59 PM	Run finished at 10:00 PM
3/15/2011	10:00:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/15/2011	10:01:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/15/2011	10:01:51 PM	Recipe started at 10:01 PM
3/15/2011	10:01:51 PM	Helium valve closed
3/15/2011	10:01:51 PM	H2 valve closed
3/15/2011	10:01:51 PM	BCl3 valve closed
3/15/2011	10:01:51 PM	PH3 valve closed
3/15/2011	10:01:51 PM	SiCl4 pre valve closed
3/15/2011	10:01:51 PM	SiCl4 post valve closed
3/15/2011	10:01:51 PM	Main Vac valve closed
3/15/2011	10:01:51 PM	Bubbler valve closed
3/15/2011	10:01:51 PM	Bypass valve opened
3/15/2011	10:01:51 PM	Helium MFC set to  0.000000
3/15/2011	10:01:51 PM	H2 MFC set to  0.000000
3/15/2011	10:01:51 PM	BCl3 MFC set to  0.000000
3/15/2011	10:01:51 PM	PHl3 MFC set to  0.000000
3/15/2011	10:01:51 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:01:51 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:01:51 PM	Tube furnace set to 0
3/15/2011	10:01:51 PM	Helium valve closed
3/15/2011	10:01:51 PM	H2 valve closed
3/15/2011	10:01:51 PM	BCl3 valve closed
3/15/2011	10:01:51 PM	PH3 valve closed
3/15/2011	10:01:51 PM	SiCl4 pre valve closed
3/15/2011	10:01:51 PM	SiCl4 post valve closed
3/15/2011	10:01:51 PM	Bubbler valve closed
3/15/2011	10:01:51 PM	Main Vac valve opened
3/15/2011	10:01:51 PM	Bypass valve opened
3/15/2011	10:01:51 PM	Helium MFC set to  0.000000
3/15/2011	10:01:51 PM	H2 MFC set to  0.000000
3/15/2011	10:01:51 PM	BCl3 MFC set to  0.000000
3/15/2011	10:01:51 PM	PHl3 MFC set to  0.000000
3/15/2011	10:01:51 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:01:51 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:01:51 PM	Tube furnace set to 0
3/15/2011	10:02:51 PM	H2 valve closed
3/15/2011	10:02:51 PM	BCl3 valve closed
3/15/2011	10:02:51 PM	PH3 valve closed
3/15/2011	10:02:51 PM	SiCl4 pre valve closed
3/15/2011	10:02:51 PM	SiCl4 post valve closed
3/15/2011	10:02:51 PM	Bubbler valve closed
3/15/2011	10:02:51 PM	Helium valve opened
3/15/2011	10:02:51 PM	Main Vac valve opened
3/15/2011	10:02:51 PM	Bypass valve opened
3/15/2011	10:02:51 PM	Helium MFC set to  100.000000
3/15/2011	10:02:51 PM	H2 MFC set to  0.000000
3/15/2011	10:02:51 PM	BCl3 MFC set to  0.000000
3/15/2011	10:02:51 PM	PHl3 MFC set to  0.000000
3/15/2011	10:02:51 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:02:51 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:02:51 PM	Tube furnace set to 0
3/15/2011	10:03:51 PM	Helium valve closed
3/15/2011	10:03:51 PM	H2 valve closed
3/15/2011	10:03:51 PM	BCl3 valve closed
3/15/2011	10:03:51 PM	PH3 valve closed
3/15/2011	10:03:51 PM	SiCl4 pre valve closed
3/15/2011	10:03:51 PM	SiCl4 post valve closed
3/15/2011	10:03:51 PM	Bubbler valve closed
3/15/2011	10:03:51 PM	Main Vac valve opened
3/15/2011	10:03:51 PM	Bypass valve opened
3/15/2011	10:03:51 PM	Helium MFC set to  0.000000
3/15/2011	10:03:51 PM	H2 MFC set to  0.000000
3/15/2011	10:03:51 PM	BCl3 MFC set to  0.000000
3/15/2011	10:03:51 PM	PHl3 MFC set to  0.000000
3/15/2011	10:03:51 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:03:51 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:03:52 PM	Tube furnace set to 0
3/15/2011	10:04:52 PM	H2 valve closed
3/15/2011	10:04:52 PM	BCl3 valve closed
3/15/2011	10:04:52 PM	PH3 valve closed
3/15/2011	10:04:52 PM	SiCl4 pre valve closed
3/15/2011	10:04:52 PM	SiCl4 post valve closed
3/15/2011	10:04:52 PM	Bubbler valve closed
3/15/2011	10:04:52 PM	Helium valve opened
3/15/2011	10:04:52 PM	Main Vac valve opened
3/15/2011	10:04:52 PM	Bypass valve opened
3/15/2011	10:04:52 PM	Helium MFC set to  100.000000
3/15/2011	10:04:52 PM	H2 MFC set to  0.000000
3/15/2011	10:04:52 PM	BCl3 MFC set to  0.000000
3/15/2011	10:04:52 PM	PHl3 MFC set to  0.000000
3/15/2011	10:04:52 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:04:52 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:04:52 PM	Tube furnace set to 0
3/15/2011	10:05:52 PM	Helium valve closed
3/15/2011	10:05:52 PM	H2 valve closed
3/15/2011	10:05:52 PM	BCl3 valve closed
3/15/2011	10:05:52 PM	PH3 valve closed
3/15/2011	10:05:52 PM	SiCl4 pre valve closed
3/15/2011	10:05:52 PM	SiCl4 post valve closed
3/15/2011	10:05:52 PM	Bubbler valve closed
3/15/2011	10:05:52 PM	Main Vac valve opened
3/15/2011	10:05:52 PM	Bypass valve opened
3/15/2011	10:05:52 PM	Helium MFC set to  0.000000
3/15/2011	10:05:52 PM	H2 MFC set to  0.000000
3/15/2011	10:05:52 PM	BCl3 MFC set to  0.000000
3/15/2011	10:05:52 PM	PHl3 MFC set to  0.000000
3/15/2011	10:05:52 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:05:52 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:05:52 PM	Tube furnace set to 0
3/15/2011	10:06:52 PM	H2 valve closed
3/15/2011	10:06:52 PM	BCl3 valve closed
3/15/2011	10:06:52 PM	PH3 valve closed
3/15/2011	10:06:52 PM	SiCl4 pre valve closed
3/15/2011	10:06:52 PM	SiCl4 post valve closed
3/15/2011	10:06:52 PM	Bubbler valve closed
3/15/2011	10:06:52 PM	Helium valve opened
3/15/2011	10:06:52 PM	Main Vac valve opened
3/15/2011	10:06:52 PM	Bypass valve opened
3/15/2011	10:06:52 PM	Helium MFC set to  100.000000
3/15/2011	10:06:52 PM	H2 MFC set to  0.000000
3/15/2011	10:06:52 PM	BCl3 MFC set to  0.000000
3/15/2011	10:06:52 PM	PHl3 MFC set to  0.000000
3/15/2011	10:06:52 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:06:52 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:06:52 PM	Tube furnace set to 0
3/15/2011	10:07:52 PM	Helium valve closed
3/15/2011	10:07:52 PM	H2 valve closed
3/15/2011	10:07:52 PM	BCl3 valve closed
3/15/2011	10:07:52 PM	PH3 valve closed
3/15/2011	10:07:52 PM	SiCl4 pre valve closed
3/15/2011	10:07:52 PM	SiCl4 post valve closed
3/15/2011	10:07:52 PM	Bubbler valve closed
3/15/2011	10:07:52 PM	Main Vac valve opened
3/15/2011	10:07:52 PM	Bypass valve opened
3/15/2011	10:07:52 PM	Helium MFC set to  0.000000
3/15/2011	10:07:52 PM	H2 MFC set to  0.000000
3/15/2011	10:07:52 PM	BCl3 MFC set to  0.000000
3/15/2011	10:07:52 PM	PHl3 MFC set to  0.000000
3/15/2011	10:07:52 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:07:52 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:07:52 PM	Tube furnace set to 0
3/15/2011	10:08:52 PM	H2 valve closed
3/15/2011	10:08:52 PM	BCl3 valve closed
3/15/2011	10:08:52 PM	PH3 valve closed
3/15/2011	10:08:52 PM	SiCl4 pre valve closed
3/15/2011	10:08:52 PM	SiCl4 post valve closed
3/15/2011	10:08:52 PM	Bubbler valve closed
3/15/2011	10:08:52 PM	Helium valve opened
3/15/2011	10:08:52 PM	Main Vac valve opened
3/15/2011	10:08:52 PM	Bypass valve opened
3/15/2011	10:08:52 PM	Helium MFC set to  100.000000
3/15/2011	10:08:52 PM	H2 MFC set to  0.000000
3/15/2011	10:08:52 PM	BCl3 MFC set to  0.000000
3/15/2011	10:08:52 PM	PHl3 MFC set to  0.000000
3/15/2011	10:08:52 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:08:52 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:08:53 PM	Tube furnace set to 0
3/15/2011	10:09:53 PM	Helium valve closed
3/15/2011	10:09:53 PM	H2 valve closed
3/15/2011	10:09:53 PM	BCl3 valve closed
3/15/2011	10:09:53 PM	PH3 valve closed
3/15/2011	10:09:53 PM	SiCl4 pre valve closed
3/15/2011	10:09:53 PM	SiCl4 post valve closed
3/15/2011	10:09:53 PM	Bubbler valve closed
3/15/2011	10:09:53 PM	Main Vac valve opened
3/15/2011	10:09:53 PM	Bypass valve opened
3/15/2011	10:09:53 PM	Helium MFC set to  0.000000
3/15/2011	10:09:53 PM	H2 MFC set to  0.000000
3/15/2011	10:09:53 PM	BCl3 MFC set to  0.000000
3/15/2011	10:09:53 PM	PHl3 MFC set to  0.000000
3/15/2011	10:09:53 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:09:53 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:09:53 PM	Tube furnace set to 0
3/15/2011	10:10:53 PM	H2 valve closed
3/15/2011	10:10:53 PM	BCl3 valve closed
3/15/2011	10:10:53 PM	PH3 valve closed
3/15/2011	10:10:53 PM	SiCl4 pre valve closed
3/15/2011	10:10:53 PM	SiCl4 post valve closed
3/15/2011	10:10:53 PM	Bubbler valve closed
3/15/2011	10:10:53 PM	Helium valve opened
3/15/2011	10:10:53 PM	Main Vac valve opened
3/15/2011	10:10:53 PM	Bypass valve opened
3/15/2011	10:10:53 PM	Helium MFC set to  100.000000
3/15/2011	10:10:53 PM	H2 MFC set to  0.000000
3/15/2011	10:10:53 PM	BCl3 MFC set to  0.000000
3/15/2011	10:10:53 PM	PHl3 MFC set to  0.000000
3/15/2011	10:10:53 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:10:53 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:10:53 PM	Tube furnace set to 0
3/15/2011	10:11:53 PM	Helium valve closed
3/15/2011	10:11:53 PM	H2 valve closed
3/15/2011	10:11:53 PM	BCl3 valve closed
3/15/2011	10:11:53 PM	PH3 valve closed
3/15/2011	10:11:53 PM	SiCl4 pre valve closed
3/15/2011	10:11:53 PM	SiCl4 post valve closed
3/15/2011	10:11:53 PM	Bubbler valve closed
3/15/2011	10:11:53 PM	Main Vac valve opened
3/15/2011	10:11:53 PM	Bypass valve opened
3/15/2011	10:11:53 PM	Helium MFC set to  0.000000
3/15/2011	10:11:53 PM	H2 MFC set to  0.000000
3/15/2011	10:11:53 PM	BCl3 MFC set to  0.000000
3/15/2011	10:11:53 PM	PHl3 MFC set to  0.000000
3/15/2011	10:11:53 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:11:53 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:11:53 PM	Tube furnace set to 0
3/15/2011	10:12:53 PM	H2 valve closed
3/15/2011	10:12:53 PM	BCl3 valve closed
3/15/2011	10:12:53 PM	PH3 valve closed
3/15/2011	10:12:53 PM	SiCl4 pre valve closed
3/15/2011	10:12:53 PM	SiCl4 post valve closed
3/15/2011	10:12:53 PM	Bubbler valve closed
3/15/2011	10:12:53 PM	Helium valve opened
3/15/2011	10:12:53 PM	Main Vac valve opened
3/15/2011	10:12:53 PM	Bypass valve opened
3/15/2011	10:12:53 PM	Helium MFC set to  100.000000
3/15/2011	10:12:53 PM	H2 MFC set to  0.000000
3/15/2011	10:12:53 PM	BCl3 MFC set to  0.000000
3/15/2011	10:12:53 PM	PHl3 MFC set to  0.000000
3/15/2011	10:12:53 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:12:53 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:12:53 PM	Tube furnace set to 0
3/15/2011	10:13:53 PM	Helium valve closed
3/15/2011	10:13:53 PM	H2 valve closed
3/15/2011	10:13:53 PM	BCl3 valve closed
3/15/2011	10:13:53 PM	PH3 valve closed
3/15/2011	10:13:53 PM	SiCl4 pre valve closed
3/15/2011	10:13:53 PM	SiCl4 post valve closed
3/15/2011	10:13:53 PM	Bubbler valve closed
3/15/2011	10:13:53 PM	Main Vac valve opened
3/15/2011	10:13:53 PM	Bypass valve opened
3/15/2011	10:13:53 PM	Helium MFC set to  0.000000
3/15/2011	10:13:53 PM	H2 MFC set to  0.000000
3/15/2011	10:13:53 PM	BCl3 MFC set to  0.000000
3/15/2011	10:13:53 PM	PHl3 MFC set to  0.000000
3/15/2011	10:13:53 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:13:53 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:13:54 PM	Tube furnace set to 0
3/15/2011	10:14:54 PM	H2 valve closed
3/15/2011	10:14:54 PM	BCl3 valve closed
3/15/2011	10:14:54 PM	PH3 valve closed
3/15/2011	10:14:54 PM	SiCl4 pre valve closed
3/15/2011	10:14:54 PM	SiCl4 post valve closed
3/15/2011	10:14:54 PM	Bubbler valve closed
3/15/2011	10:14:54 PM	Helium valve opened
3/15/2011	10:14:54 PM	Main Vac valve opened
3/15/2011	10:14:54 PM	Bypass valve opened
3/15/2011	10:14:54 PM	Helium MFC set to  100.000000
3/15/2011	10:14:54 PM	H2 MFC set to  0.000000
3/15/2011	10:14:54 PM	BCl3 MFC set to  0.000000
3/15/2011	10:14:54 PM	PHl3 MFC set to  0.000000
3/15/2011	10:14:54 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:14:54 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:14:54 PM	Tube furnace set to 0
3/15/2011	10:15:54 PM	Helium valve closed
3/15/2011	10:15:54 PM	H2 valve closed
3/15/2011	10:15:54 PM	BCl3 valve closed
3/15/2011	10:15:54 PM	PH3 valve closed
3/15/2011	10:15:54 PM	SiCl4 pre valve closed
3/15/2011	10:15:54 PM	SiCl4 post valve closed
3/15/2011	10:15:54 PM	Bubbler valve closed
3/15/2011	10:15:54 PM	Main Vac valve opened
3/15/2011	10:15:54 PM	Bypass valve opened
3/15/2011	10:15:54 PM	Helium MFC set to  0.000000
3/15/2011	10:15:54 PM	H2 MFC set to  0.000000
3/15/2011	10:15:54 PM	BCl3 MFC set to  0.000000
3/15/2011	10:15:54 PM	PHl3 MFC set to  0.000000
3/15/2011	10:15:54 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:15:54 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:15:54 PM	Tube furnace set to 0
3/15/2011	10:16:54 PM	H2 valve closed
3/15/2011	10:16:54 PM	BCl3 valve closed
3/15/2011	10:16:54 PM	PH3 valve closed
3/15/2011	10:16:54 PM	SiCl4 pre valve closed
3/15/2011	10:16:54 PM	SiCl4 post valve closed
3/15/2011	10:16:54 PM	Bubbler valve closed
3/15/2011	10:16:54 PM	Helium valve opened
3/15/2011	10:16:54 PM	Main Vac valve opened
3/15/2011	10:16:54 PM	Bypass valve opened
3/15/2011	10:16:54 PM	Helium MFC set to  100.000000
3/15/2011	10:16:54 PM	H2 MFC set to  0.000000
3/15/2011	10:16:54 PM	BCl3 MFC set to  0.000000
3/15/2011	10:16:54 PM	PHl3 MFC set to  0.000000
3/15/2011	10:16:54 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:16:54 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:16:54 PM	Tube furnace set to 0
3/15/2011	10:17:54 PM	Helium valve closed
3/15/2011	10:17:54 PM	H2 valve closed
3/15/2011	10:17:54 PM	BCl3 valve closed
3/15/2011	10:17:54 PM	PH3 valve closed
3/15/2011	10:17:54 PM	SiCl4 pre valve closed
3/15/2011	10:17:54 PM	SiCl4 post valve closed
3/15/2011	10:17:54 PM	Bubbler valve closed
3/15/2011	10:17:54 PM	Main Vac valve opened
3/15/2011	10:17:54 PM	Bypass valve opened
3/15/2011	10:17:54 PM	Helium MFC set to  0.000000
3/15/2011	10:17:54 PM	H2 MFC set to  0.000000
3/15/2011	10:17:54 PM	BCl3 MFC set to  0.000000
3/15/2011	10:17:54 PM	PHl3 MFC set to  0.000000
3/15/2011	10:17:54 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:17:54 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:17:54 PM	Tube furnace set to 0
3/15/2011	10:18:54 PM	H2 valve closed
3/15/2011	10:18:54 PM	BCl3 valve closed
3/15/2011	10:18:54 PM	PH3 valve closed
3/15/2011	10:18:54 PM	SiCl4 pre valve closed
3/15/2011	10:18:54 PM	SiCl4 post valve closed
3/15/2011	10:18:54 PM	Bubbler valve closed
3/15/2011	10:18:54 PM	Helium valve opened
3/15/2011	10:18:54 PM	Main Vac valve opened
3/15/2011	10:18:54 PM	Bypass valve opened
3/15/2011	10:18:54 PM	Helium MFC set to  100.000000
3/15/2011	10:18:54 PM	H2 MFC set to  0.000000
3/15/2011	10:18:54 PM	BCl3 MFC set to  0.000000
3/15/2011	10:18:54 PM	PHl3 MFC set to  0.000000
3/15/2011	10:18:54 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:18:54 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:18:55 PM	Tube furnace set to 0
3/15/2011	10:19:55 PM	Helium valve closed
3/15/2011	10:19:55 PM	H2 valve closed
3/15/2011	10:19:55 PM	BCl3 valve closed
3/15/2011	10:19:55 PM	PH3 valve closed
3/15/2011	10:19:55 PM	SiCl4 pre valve closed
3/15/2011	10:19:55 PM	SiCl4 post valve closed
3/15/2011	10:19:55 PM	Bubbler valve closed
3/15/2011	10:19:55 PM	Main Vac valve opened
3/15/2011	10:19:55 PM	Bypass valve opened
3/15/2011	10:19:55 PM	Helium MFC set to  0.000000
3/15/2011	10:19:55 PM	H2 MFC set to  0.000000
3/15/2011	10:19:55 PM	BCl3 MFC set to  0.000000
3/15/2011	10:19:55 PM	PHl3 MFC set to  0.000000
3/15/2011	10:19:55 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:19:55 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:19:55 PM	Tube furnace set to 0
3/15/2011	10:20:55 PM	H2 valve closed
3/15/2011	10:20:55 PM	BCl3 valve closed
3/15/2011	10:20:55 PM	PH3 valve closed
3/15/2011	10:20:55 PM	SiCl4 pre valve closed
3/15/2011	10:20:55 PM	SiCl4 post valve closed
3/15/2011	10:20:55 PM	Bubbler valve closed
3/15/2011	10:20:55 PM	Helium valve opened
3/15/2011	10:20:55 PM	Main Vac valve opened
3/15/2011	10:20:55 PM	Bypass valve opened
3/15/2011	10:20:55 PM	Helium MFC set to  100.000000
3/15/2011	10:20:55 PM	H2 MFC set to  0.000000
3/15/2011	10:20:55 PM	BCl3 MFC set to  0.000000
3/15/2011	10:20:55 PM	PHl3 MFC set to  0.000000
3/15/2011	10:20:55 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:20:55 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:20:55 PM	Tube furnace set to 0
3/15/2011	10:21:10 PM	Run aborted at 10:21 PM
3/15/2011	10:21:10 PM	Helium valve closed
3/15/2011	10:21:10 PM	H2 valve closed
3/15/2011	10:21:10 PM	BCl3 valve closed
3/15/2011	10:21:10 PM	PH3 valve closed
3/15/2011	10:21:10 PM	SiCl4 pre valve closed
3/15/2011	10:21:10 PM	SiCl4 post valve closed
3/15/2011	10:21:10 PM	Bypass valve closed
3/15/2011	10:21:10 PM	Main Vac valve closed
3/15/2011	10:21:10 PM	Bubbler valve closed
3/15/2011	10:21:10 PM	Helium MFC set to  0.000000
3/15/2011	10:21:10 PM	H2 MFC set to  0.000000
3/15/2011	10:21:10 PM	BCl3 MFC set to  0.000000
3/15/2011	10:21:10 PM	PHl3 MFC set to  0.000000
3/15/2011	10:21:10 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:21:10 PM	Tube furnace set to 0
3/15/2011	10:21:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/15/2011	10:21:10 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	10:21:11 PM	Recipe started at 10:21 PM
3/15/2011	10:21:11 PM	Helium valve closed
3/15/2011	10:21:11 PM	H2 valve closed
3/15/2011	10:21:11 PM	BCl3 valve closed
3/15/2011	10:21:11 PM	PH3 valve closed
3/15/2011	10:21:11 PM	SiCl4 pre valve closed
3/15/2011	10:21:11 PM	SiCl4 post valve closed
3/15/2011	10:21:11 PM	Main Vac valve closed
3/15/2011	10:21:11 PM	Bubbler valve closed
3/15/2011	10:21:11 PM	Bypass valve opened
3/15/2011	10:21:11 PM	Helium MFC set to  0.000000
3/15/2011	10:21:11 PM	H2 MFC set to  0.000000
3/15/2011	10:21:11 PM	BCl3 MFC set to  0.000000
3/15/2011	10:21:11 PM	PHl3 MFC set to  0.000000
3/15/2011	10:21:11 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:21:11 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:21:11 PM	Tube furnace set to 0
3/15/2011	10:21:11 PM	Helium valve closed
3/15/2011	10:21:11 PM	H2 valve closed
3/15/2011	10:21:11 PM	BCl3 valve closed
3/15/2011	10:21:11 PM	PH3 valve closed
3/15/2011	10:21:12 PM	SiCl4 pre valve closed
3/15/2011	10:21:12 PM	SiCl4 post valve closed
3/15/2011	10:21:12 PM	Bubbler valve closed
3/15/2011	10:21:12 PM	Main Vac valve opened
3/15/2011	10:21:12 PM	Bypass valve opened
3/15/2011	10:21:12 PM	Helium MFC set to  0.000000
3/15/2011	10:21:12 PM	H2 MFC set to  0.000000
3/15/2011	10:21:12 PM	BCl3 MFC set to  0.000000
3/15/2011	10:21:12 PM	PHl3 MFC set to  0.000000
3/15/2011	10:21:12 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:21:12 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:21:12 PM	Tube furnace set to 0
3/15/2011	10:21:12 PM	Run finished at 10:21 PM
3/15/2011	10:21:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	10:21:59 PM	Recipe started at 10:21 PM
3/15/2011	10:21:59 PM	Helium valve closed
3/15/2011	10:21:59 PM	BCl3 valve closed
3/15/2011	10:21:59 PM	PH3 valve closed
3/15/2011	10:21:59 PM	SiCl4 pre valve closed
3/15/2011	10:21:59 PM	SiCl4 post valve closed
3/15/2011	10:21:59 PM	Main Vac valve closed
3/15/2011	10:21:59 PM	Bypass valve closed
3/15/2011	10:21:59 PM	Bubbler valve closed
3/15/2011	10:21:59 PM	H2 valve opened
3/15/2011	10:21:59 PM	Helium MFC set to  0.000000
3/15/2011	10:21:59 PM	H2 MFC set to  500.000000
3/15/2011	10:21:59 PM	BCl3 MFC set to  0.000000
3/15/2011	10:21:59 PM	PHl3 MFC set to  0.000000
3/15/2011	10:21:59 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:21:59 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:21:59 PM	Tube furnace set to 0
3/15/2011	10:23:18 PM	Helium valve closed
3/15/2011	10:23:18 PM	BCl3 valve closed
3/15/2011	10:23:18 PM	PH3 valve closed
3/15/2011	10:23:18 PM	SiCl4 pre valve closed
3/15/2011	10:23:18 PM	SiCl4 post valve closed
3/15/2011	10:23:18 PM	Main Vac valve closed
3/15/2011	10:23:18 PM	Bypass valve closed
3/15/2011	10:23:18 PM	H2 valve opened
3/15/2011	10:23:18 PM	Bubbler valve opened
3/15/2011	10:23:18 PM	Helium MFC set to  0.000000
3/15/2011	10:23:18 PM	H2 MFC set to  500.000000
3/15/2011	10:23:18 PM	BCl3 MFC set to  0.000000
3/15/2011	10:23:18 PM	PHl3 MFC set to  0.000000
3/15/2011	10:23:18 PM	SiCl4 MFC set to  0.000000
3/15/2011	10:23:18 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:23:18 PM	Tube furnace set to 1000
3/15/2011	10:43:18 PM	Helium valve closed
3/15/2011	10:43:18 PM	PH3 valve closed
3/15/2011	10:43:18 PM	Main Vac valve closed
3/15/2011	10:43:18 PM	Bypass valve closed
3/15/2011	10:43:18 PM	H2 valve opened
3/15/2011	10:43:18 PM	BCl3 valve opened
3/15/2011	10:43:18 PM	SiCl4 pre valve opened
3/15/2011	10:43:18 PM	SiCl4 post valve opened
3/15/2011	10:43:18 PM	Bubbler valve opened
3/15/2011	10:43:18 PM	Helium MFC set to  0.000000
3/15/2011	10:43:18 PM	H2 MFC set to  500.000000
3/15/2011	10:43:18 PM	BCl3 MFC set to  2.500000
3/15/2011	10:43:18 PM	PHl3 MFC set to  0.000000
3/15/2011	10:43:18 PM	SiCl4 MFC set to  50.000000
3/15/2011	10:43:18 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	10:43:19 PM	Tube furnace set to 1000
3/15/2011	11:03:19 PM	H2 valve closed
3/15/2011	11:03:19 PM	BCl3 valve closed
3/15/2011	11:03:19 PM	PH3 valve closed
3/15/2011	11:03:19 PM	SiCl4 pre valve closed
3/15/2011	11:03:19 PM	SiCl4 post valve closed
3/15/2011	11:03:19 PM	Main Vac valve closed
3/15/2011	11:03:19 PM	Bypass valve closed
3/15/2011	11:03:19 PM	Helium valve opened
3/15/2011	11:03:19 PM	Bubbler valve opened
3/15/2011	11:03:19 PM	Helium MFC set to  500.000000
3/15/2011	11:03:19 PM	H2 MFC set to  0.000000
3/15/2011	11:03:19 PM	BCl3 MFC set to  0.000000
3/15/2011	11:03:19 PM	PHl3 MFC set to  0.000000
3/15/2011	11:03:19 PM	SiCl4 MFC set to  0.000000
3/15/2011	11:03:19 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	11:03:19 PM	Tube furnace set to 0
3/15/2011	11:23:19 PM	Helium valve closed
3/15/2011	11:23:19 PM	H2 valve closed
3/15/2011	11:23:19 PM	BCl3 valve closed
3/15/2011	11:23:19 PM	PH3 valve closed
3/15/2011	11:23:19 PM	SiCl4 pre valve closed
3/15/2011	11:23:19 PM	SiCl4 post valve closed
3/15/2011	11:23:19 PM	Main Vac valve closed
3/15/2011	11:23:19 PM	Bypass valve closed
3/15/2011	11:23:19 PM	Bubbler valve closed
3/15/2011	11:23:19 PM	Helium MFC set to  0.000000
3/15/2011	11:23:19 PM	H2 MFC set to  0.000000
3/15/2011	11:23:19 PM	BCl3 MFC set to  0.000000
3/15/2011	11:23:19 PM	PHl3 MFC set to  0.000000
3/15/2011	11:23:19 PM	SiCl4 MFC set to  0.000000
3/15/2011	11:23:19 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	11:23:19 PM	Tube furnace set to 0
3/15/2011	11:23:19 PM	Run finished at 11:23 PM
3/15/2011	11:50:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2011	11:50:49 PM	Recipe started at 11:50 PM
3/15/2011	11:50:49 PM	H2 valve closed
3/15/2011	11:50:49 PM	BCl3 valve closed
3/15/2011	11:50:49 PM	PH3 valve closed
3/15/2011	11:50:49 PM	SiCl4 pre valve closed
3/15/2011	11:50:49 PM	SiCl4 post valve closed
3/15/2011	11:50:49 PM	Main Vac valve closed
3/15/2011	11:50:49 PM	Bypass valve closed
3/15/2011	11:50:49 PM	Bubbler valve closed
3/15/2011	11:50:49 PM	Helium valve opened
3/15/2011	11:50:49 PM	Helium MFC set to  500.000000
3/15/2011	11:50:49 PM	H2 MFC set to  0.000000
3/15/2011	11:50:49 PM	BCl3 MFC set to  0.000000
3/15/2011	11:50:49 PM	PHl3 MFC set to  0.000000
3/15/2011	11:50:49 PM	SiCl4 MFC set to  0.000000
3/15/2011	11:50:49 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	11:50:49 PM	Tube furnace set to 0
3/15/2011	11:50:55 PM	Helium valve closed
3/15/2011	11:50:55 PM	H2 valve closed
3/15/2011	11:50:55 PM	BCl3 valve closed
3/15/2011	11:50:55 PM	PH3 valve closed
3/15/2011	11:50:55 PM	SiCl4 pre valve closed
3/15/2011	11:50:55 PM	SiCl4 post valve closed
3/15/2011	11:50:55 PM	Main Vac valve closed
3/15/2011	11:50:55 PM	Bypass valve closed
3/15/2011	11:50:55 PM	Bubbler valve closed
3/15/2011	11:50:55 PM	Helium MFC set to  0.000000
3/15/2011	11:50:55 PM	H2 MFC set to  0.000000
3/15/2011	11:50:55 PM	BCl3 MFC set to  0.000000
3/15/2011	11:50:55 PM	PHl3 MFC set to  0.000000
3/15/2011	11:50:55 PM	SiCl4 MFC set to  0.000000
3/15/2011	11:50:55 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	11:50:55 PM	Tube furnace set to 0
3/15/2011	11:50:56 PM	Run finished at 11:50 PM
3/15/2011	11:50:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/15/2011	11:54:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	11:54:08 PM	Recipe started at 11:54 PM
3/15/2011	11:54:08 PM	Helium valve closed
3/15/2011	11:54:08 PM	H2 valve closed
3/15/2011	11:54:08 PM	BCl3 valve closed
3/15/2011	11:54:08 PM	PH3 valve closed
3/15/2011	11:54:08 PM	SiCl4 pre valve closed
3/15/2011	11:54:08 PM	SiCl4 post valve closed
3/15/2011	11:54:08 PM	Main Vac valve closed
3/15/2011	11:54:08 PM	Bubbler valve closed
3/15/2011	11:54:08 PM	Bypass valve opened
3/15/2011	11:54:08 PM	Helium MFC set to  0.000000
3/15/2011	11:54:08 PM	H2 MFC set to  0.000000
3/15/2011	11:54:08 PM	BCl3 MFC set to  0.000000
3/15/2011	11:54:08 PM	PHl3 MFC set to  0.000000
3/15/2011	11:54:08 PM	SiCl4 MFC set to  0.000000
3/15/2011	11:54:08 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	11:54:08 PM	Tube furnace set to 0
3/15/2011	11:54:40 PM	Helium valve closed
3/15/2011	11:54:40 PM	H2 valve closed
3/15/2011	11:54:40 PM	BCl3 valve closed
3/15/2011	11:54:40 PM	PH3 valve closed
3/15/2011	11:54:41 PM	SiCl4 pre valve closed
3/15/2011	11:54:41 PM	SiCl4 post valve closed
3/15/2011	11:54:41 PM	Bubbler valve closed
3/15/2011	11:54:41 PM	Main Vac valve opened
3/15/2011	11:54:41 PM	Bypass valve opened
3/15/2011	11:54:41 PM	Helium MFC set to  0.000000
3/15/2011	11:54:41 PM	H2 MFC set to  0.000000
3/15/2011	11:54:41 PM	BCl3 MFC set to  0.000000
3/15/2011	11:54:41 PM	PHl3 MFC set to  0.000000
3/15/2011	11:54:41 PM	SiCl4 MFC set to  0.000000
3/15/2011	11:54:41 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	11:54:41 PM	Tube furnace set to 0
3/15/2011	11:54:41 PM	Run finished at 11:54 PM
3/15/2011	11:54:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/15/2011	11:55:19 PM	Helium MFC set to  10.000000
3/15/2011	11:55:19 PM	Helium valve opened
3/15/2011	11:56:14 PM	Helium MFC set to  0.000000
3/15/2011	11:56:15 PM	Helium valve closed
3/15/2011	11:58:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/15/2011	11:59:04 PM	Recipe started at 11:58 PM
3/15/2011	11:59:04 PM	Helium valve closed
3/15/2011	11:59:04 PM	H2 valve closed
3/15/2011	11:59:04 PM	BCl3 valve closed
3/15/2011	11:59:04 PM	PH3 valve closed
3/15/2011	11:59:04 PM	SiCl4 pre valve closed
3/15/2011	11:59:04 PM	SiCl4 post valve closed
3/15/2011	11:59:04 PM	Main Vac valve closed
3/15/2011	11:59:04 PM	Bubbler valve closed
3/15/2011	11:59:04 PM	Bypass valve opened
3/15/2011	11:59:04 PM	Helium MFC set to  0.000000
3/15/2011	11:59:04 PM	H2 MFC set to  0.000000
3/15/2011	11:59:04 PM	BCl3 MFC set to  0.000000
3/15/2011	11:59:04 PM	PHl3 MFC set to  0.000000
3/15/2011	11:59:04 PM	SiCl4 MFC set to  0.000000
3/15/2011	11:59:04 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	11:59:04 PM	Tube furnace set to 0
3/15/2011	11:59:05 PM	Helium valve closed
3/15/2011	11:59:05 PM	H2 valve closed
3/15/2011	11:59:05 PM	BCl3 valve closed
3/15/2011	11:59:05 PM	PH3 valve closed
3/15/2011	11:59:05 PM	SiCl4 pre valve closed
3/15/2011	11:59:05 PM	SiCl4 post valve closed
3/15/2011	11:59:05 PM	Bubbler valve closed
3/15/2011	11:59:05 PM	Main Vac valve opened
3/15/2011	11:59:05 PM	Bypass valve opened
3/15/2011	11:59:05 PM	Helium MFC set to  0.000000
3/15/2011	11:59:05 PM	H2 MFC set to  0.000000
3/15/2011	11:59:05 PM	BCl3 MFC set to  0.000000
3/15/2011	11:59:05 PM	PHl3 MFC set to  0.000000
3/15/2011	11:59:05 PM	SiCl4 MFC set to  0.000000
3/15/2011	11:59:05 PM	Bypass solenoid MFC set to  0.000000
3/15/2011	11:59:05 PM	Tube furnace set to 0
